Apparatus for grinding a surface of substrate

Abstract

An apparatus for grinding a surface of a substrate, the apparatus including an inlet through which a jig accommodating the substrate is put; a grinding part that grinds the substrate conveyed from the inlet; and a washing part that washes the substrate conveyed from the grinding part, wherein the grinding part includes a plurality of rollers, the plurality of rollers having a protruding curved surface facing the jig and rotating on a surface of the substrate to grind the substrate, and the inlet, the grinding part, and the washing part are continuously conveyed by a conveyor.

What is claimed is: 
     
         1 . An apparatus for grinding a surface of a substrate, the apparatus comprising:
 an inlet through which a jig accommodating the substrate is put;   a grinding part that grinds the substrate conveyed from the inlet; and   a washing part that washes the substrate conveyed from the grinding part,   wherein:   the grinding part includes a plurality of rollers, the plurality of rollers having a protruding curved surface facing the jig and rotating on a surface of the substrate to grind the substrate, and   the inlet, the grinding part, and the washing part are continuously conveyed by a conveyor.   
     
     
         2 . The apparatus as claimed in  claim 1 , wherein the rollers are orthogonally disposed relative to a conveyance direction of the jig. 
     
     
         3 . The apparatus as claimed in  claim 1 , wherein the jig includes a substrate disposition part for accommodating the substrate. 
     
     
         4 . The apparatus as claimed in  claim 3 , wherein the substrate disposition part of the jig is recessed in the jig and faces the rollers. 
     
     
         5 . The apparatus as claimed in  claim 4 , wherein:
 a number of substrate disposition parts of the jig is the same as a number of rollers of the grinding part, and   the substrate disposition parts are disposed to face each of the rollers.   
     
     
         6 . The apparatus as claimed in  claim 3 , wherein the substrate disposition part of the jig convexly protrudes toward the roller. 
     
     
         7 . The apparatus as claimed in  claim 6 , wherein:
 the substrate disposition part is plural in number,   each substrate disposition part of the jig is offset from the rollers such that each substrate disposition part is between two rollers, depending on movement of the jig, and   central portions of respective rollers are aligned between the substrate disposition parts.   
     
     
         8 . The apparatus as claimed in  claim 3 , wherein the substrate disposition part of the jig includes a vacuum holding part for coupling with and holding the substrate. 
     
     
         9 . The apparatus as claimed in  claim 1 , wherein a lower portion of each of the rollers includes a lattice-shaped brush. 
     
     
         10 . The apparatus as claimed in  claim 9 , wherein the lower portion of each of the rollers includes a groove, the groove containing an abrasive. 
     
     
         11 . The apparatus as claimed in  claim 9 , wherein a hair diameter of the brush is 0.1 to 0.5 mm. 
     
     
         12 . The apparatus o as claimed in  claim 9 , wherein a hair length of the brush is 6 to 10 mm. 
     
     
         13 . The apparatus as claimed in  claim 9 , wherein adjacent rollers of the plurality of rollers rotate in directions opposite to each other. 
     
     
         14 . The apparatus as claimed in  claim 1 , wherein the grinding part further includes an abrasive administration part. 
     
     
         15 . The apparatus as claimed in  claim 1 , further comprising:
 an inspection part after the washing part; and   a separation and arrangement part.