Electromechanical transducer and method for fabricating the same

Abstract

An electromechanical transducer includes a first electromagnetic element and a second electromagnetic element, such as electrodes, disposed opposite to each other with a sealed cavity therebetween. The sealed cavity is formed by removing a sacrifice layer and then performing sealing. A sealing portion is formed by superposing a film of a hardened second sealing material that has fluidity at normal temperature on a film of a first sealing material that does not have fluidity at normal temperature.

What is claimed is: 
     
         1 . An electromechanical transducer comprising:
 a first electromagnetic element and a second electromagnetic element disposed opposite to each other with a sealed cavity therebetween, the sealed cavity being formed by removing a sacrifice layer and then performing sealing, wherein the performing sealing to form a sealing portion includes superposing a film of a hardened second sealing material that has fluidity at normal temperature on a film of a first sealing material that does not have fluidity at normal temperature.   
     
     
         2 . The electromechanical transducer according to  claim 1 , wherein the first electromagnetic element and the second electromagnetic element are a first electrode and a second electrode, respectively. 
     
     
         3 . The electromechanical transducer according to  claim 1 , wherein the second electromagnetic element is formed on a surface of a vibrating membrane above the sealed cavity opposite to the first electromagnetic element. 
     
     
         4 . The electromechanical transducer according to  claim 1 , wherein the film of the second sealing material is formed in an area other than the second electromagnetic element or other than part just above the sealed cavity. 
     
     
         5 . The electromechanical transducer according to  claim 1 , wherein the film of the second sealing material is thicker than the film of the first sealing material. 
     
     
         6 . The electromechanical transducer according to  claim 1 , wherein the film of the hardened second sealing material is resistant to acid and oil. 
     
     
         7 . The electromechanical transducer according to  claim 1 , wherein the second sealing material is inorganic SOG, an organic material, or a photosensitive organic material.