Sensor device, force detection device, and robot

Abstract

A sensor device includes a sensor element which is formed by laminating a piezoelectric substance and an electrode, a first case and a second case which house the sensor element therein, and a pressing portion which presses the sensor element in the lamination direction of the piezoelectric substance and the electrode via the first and second cases.

What is claimed is: 
     
         1 . A sensor device comprising:
 a sensor element including a piezoelectric substance laminated with an electrode;   a first case and a second case which house the sensor element therein; and   a pressing portion which presses the sensor element in a lamination direction of the piezoelectric substance and the electrode by the first and second cases.   
     
     
         2 . The sensor device according to  claim 1 ,
 wherein the pressing portion is an elastic member which is pressed by the first and second cases.   
     
     
         3 . The sensor device according to  claim 2 ,
 wherein the elastic member is a gasket which is formed of rubber, an elastic elastomer, or a metal.   
     
     
         4 . The sensor device according to  claim 1 ,
 wherein the pressing portion is a bellows portion which is formed in the first or second case.   
     
     
         5 . The sensor device according to  claim 1 ,
 wherein the first case and the second case have connection portions which connect the first and second cases together.   
     
     
         6 . The sensor device according to  claim 1 ,
 wherein, when a Z direction is the lamination direction of the sensor element, and an X direction and a Y direction are directions which are orthogonal to the Z direction and are orthogonal to each other, the sensor device includes at least a first sensor element which detects a force in the X direction, a second sensor element which detects a force in the Y direction, and a third sensor element which detects a force in the Z direction.   
     
     
         7 . The sensor device according to  claim 1 ,
 wherein the piezoelectric substance is quartz crystal.   
     
     
         8 . A force detection device comprising:
 the sensor device according to  claim 1 .   
     
     
         9 . A robot comprising:
 the force detection device according to  claim 8 .   
     
     
         10 . A force detection device comprising:
 a sensor element including a piezoelectric substance laminated with an electrode;   a first case and a second case which house the sensor element therein;   a pressing portion which presses the sensor element in a lamination direction of the piezoelectric substance and the electrode by the first and second cases; and   a clamping portion which clamps the sensor element housed in the first and second cases via the first and second cases.   
     
     
         11 . The force detection device according to  claim 10 ,
 wherein the force detection device includes four of the sensor elements.   
     
     
         12 . A robot comprising:
 a sensor element including a piezoelectric substance laminated with an electrode;   a first case and a second case which house the sensor element therein;   a pressing portion which presses the sensor element in a lamination direction of the piezoelectric substance and the electrode by the first and second cases;   a clamping portion which clamps the sensor element housed in the first and second cases via the first and second cases;   an arm portion which includes a plurality of rotatable joints; and   a gripping portion which selectively grips an object.