Substrate bonding apparatus and method of manufacturing display device

Abstract

An apparatus and system for bonding substrates are presented. The apparatus includes a base member formed of an insulating material and an electric field generation part formed of a conductive material. The electric field generation part extends into the base member. The electric field generation part includes a trunk part and a branch part. The trunk part extends in a first direction. The branch part extends from the trunk part in a direction different from the first direction. A substrate is fixed on the base member. An adhesive is applied on the substrate in a shape that matches that of the electric field generation part. An electric field is generated using the electric field generation part and the substrate is bonded to another substrate. The apparatus prevents or reduces formation of air bubbles in the adhesive. A method of manufacturing a display device is also presented.

What is claimed is: 
     
         1 . An apparatus for bonding substrates, the apparatus comprising:
 a base member formed of an insulating material; and   an electric field generation part formed in the base member, the electric field generation part formed of a conductive material,   wherein the electric field generation part comprises:   a trunk part extending in a first direction; and   a branch part extending from the trunk part in a direction different from the first direction.   
     
     
         2 . The apparatus of  claim 1 , wherein the electric field generation part is formed of aluminum. 
     
     
         3 . The apparatus of  claim 1 , wherein the base member is formed of polyetheretherketone (PEEK) 
     
     
         4 . The apparatus of  claim 1 , wherein the base member comprises: a plurality of adsorption sections spaced apart from the electric field generation part and extending into the base member. 
     
     
         5 . The apparatus of  claim 1 , wherein the branch part is connected to at least one of first and second ends of the trunk part and extends toward a corner of the base member. 
     
     
         6 . The apparatus of  claim 5 , wherein the base member has a quadrilateral plate-shape having first, second, third, and fourth corners; and
 wherein the branch part comprises:   a first branch part extending from the first end of the trunk part toward the first corner;   a second branch part extending from the first end of the trunk part toward the second corner;   a third branch part extending from the second end of the trunk part toward the third corner; and   a fourth branch part extending from the second end of the trunk part toward the fourth corner.   
     
     
         7 . The apparatus of  claim 6 , wherein the electric field generation part further comprises: a horizontal branch part crossing the trunk part in a direction perpendicular to the first direction. 
     
     
         8 . The apparatus of  claim 7 , wherein the electric field generation part further comprises: a spot part disposed between one of the branch parts and one of the first to fourth corners that is closest to the branch part. 
     
     
         9 . The apparatus of  claim 7 , wherein the horizontal branch part comprises: a first horizontal branch part and a second horizontal branch part spaced apart from each other with a center of the base member therebetween; and
 wherein the electric field generation part further comprises: trunk extensions connected to the first and second ends of the trunk part and extending in the first direction.   
     
     
         10 . The apparatus of  claim 5 , wherein the base member has a quadrilateral plate-shape having first, second, third, and fourth corners,
 wherein the trunk part comprises: a first trunk part and a second trunk part spaced apart from each other with a center of the base member therebetween,   wherein the branch part comprises:   a first branch part extending from a first end of the first trunk part toward the first corner;   a second branch part extending from a first end of the second trunk part toward the second corner;   a third branch part extending from a second end of the second trunk part toward the third corner; and   a fourth branch part extending from a second end of the first trunk part toward the fourth corner,   wherein the electric field generation part further comprises:   a first branch-connecting part connecting an end of the first branch part that is closest to the first corner to an end of the second branch part that is closest to the second corner, the first branch-connecting part having at least one bend; and   a second branch-connecting part connecting an end of the third branch part that is closest to the third corner to an end of the fourth branch part that is closest to the fourth corner, the second branch-connecting part having at least one bend.   
     
     
         11 . The apparatus of  claim 10 , wherein each of the first and second branch-connecting parts has a V-shape. 
     
     
         12 . A substrate bonding system comprising:
 a lower stage fixing a first substrate; and   an upper stage disposed over the lower stage and fixing a second substrate, the upper stage being configured to move in different directions,   wherein the upper stage comprises:
 a base member formed of an insulating material; and 
 an electric field generation part formed in the base substrate, the electric field generation part formed of a conductive material, 
   wherein the electric field generation part comprises:
 a trunk part extending in a first direction; and 
 a branch part extending from the trunk part in a direction different from the first direction. 
   
     
     
         13 . The substrate bonding system of  claim 12 , further comprising:
 a bonding unit configured to move the upper stage in toward and away from the lower stage.   
     
     
         14 . The substrate bonding system of  claim 12 , further comprising:
 a power supply part including a voltage source having an anode and a cathode,   wherein a top surface of the lower stage is formed of a conductive material; and   wherein one of the anode and cathode is electrically connected to the electric field generation part and the other of the anode and cathode is electrically connected to the lower stage.   
     
     
         15 . The substrate bonding system of  claim 12 , wherein the branch part is connected to at least one end of the trunk part and extends toward a corner of the base member. 
     
     
         16 . A method of manufacturing a display device, the method comprising:
 fixing a first substrate on a top surface of a lower stage;   fixing a second substrate on a bottom surface of an upper stage including a base member formed of an insulating material and an electric field generation part formed in the base member, the electric field generation part formed of a conductive material, and the electric field generation part including a trunk part extending in a first direction and a branch part extending from the trunk part in a direction different from the first direction;   applying an adhesive on the second substrate;   connecting the electric field generation part to one of an anode and a cathode;   connecting the top surface of the lower stage to the other of the anode and the cathode; and   bonding the first substrate and the second substrate to each other.   
     
     
         17 . The method of  claim 16 , wherein the adhesive is applied to match shape of the electric field generation part. 
     
     
         18 . The method of  claim 16 , wherein the second substrate is adsorbed and fixed on the bottom surface of the upper stage through a plurality of adsorption sections penetrating the base member; and
 wherein the plurality of adsorption sections are spaced apart from the electric field generation part.