US2014353019A1PendingUtilityA1
Formation of dielectric with smooth surface
Est. expiryMay 30, 2033(~6.8 yrs left)· nominal 20-yr term from priority
H05K 3/0055Y10T156/1168H05K 3/4644H05K 2203/1105Y10T156/1978H05K 3/42B32B 43/006H05K 2203/1152H05K 2203/0554H05K 3/107C23C 14/228H05K 3/0035B32B 38/10H05K 3/0014H05K 3/281H05K 3/0044H10D 64/011H10W 99/00H10W 90/734H10W 90/724H10W 74/016H10W 74/15H01L 21/02631H01L 21/02645H05K 1/0313H05K 1/115H05K 2201/01C23C 14/34C23C 14/14
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Claims
Abstract
Embodiments of the present disclosure are directed towards techniques and configurations for formation of a dielectric with a smooth surface. In one embodiment, a method includes providing a dielectric with first and second surfaces, a conductive feature formed on the first surface, and a laminate applied to the second surface, curing the second surface while the laminate remains applied, and removing the laminate. Other embodiments may be described and/or claimed.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method, comprising:
providing a dielectric with first and second surfaces, a conductive feature formed on the first surface, and a laminate applied to the second surface; curing the second surface while the laminate remains applied; and removing the laminate.
2 . The method of claim 1 , further comprising depositing a metal layer onto the second surface using a physical vapor deposition (PVD) process.
3 . The method of claim 2 , wherein:
the PVD process includes sputtering or evaporation; and the metal layer comprises a seed layer.
4 . The method of claim 1 , further comprising:
forming a via from the second surface through the dielectric to the conductive feature; and chemically desmearing the via.
5 . The method of claim 4 , wherein the drilling and desmearing are performed while the laminate remains applied to the second surface.
6 . The method of claim 4 , further comprising applying a surface masking layer to the second surface after the laminate is removed.
7 . The method of claim 6 , wherein the drilling and desmearing are performed while the surface masking layer remains applied to the second surface.
8 . The method of claim 1 , further comprising curing the second surface again after the laminate is removed.
9 . The method of claim 1 , wherein the conductive feature is a first conductive feature, the method further comprising forming a second conductive feature by depositing an electrically conductive material to fill the via, the second conductive feature being electrically coupled with the first conductive feature.
10 . The method of claim 9 , wherein the second conductive feature is formed using an additive process.
11 . The method of claim 9 , wherein the second conductive feature is formed using a subtractive process.
12 . A product formed by the method of claim 1 .
13 . A package substrate comprising:
a dielectric having a first surface and a second surface disposed opposite to the first surface; a conductive feature formed on the first surface; and a via that extends from the second surface through the dielectric to the conductive feature; wherein the second surface has a surface roughness between 40 nanometers and 75 nanometers, the second surface is shaped at least in part by a surface of a previously-applied laminate, and the dielectric includes a polymer.
14 . The package substrate of claim 13 , wherein the conductive feature is a first conductive feature, the via is filled with conductive material, and the package substrate further comprises a second conductive feature formed on the second surface and coupled with the first conductive feature.
15 . The package substrate of claim 13 , wherein the dielectric comprises an epoxy-based Ajinomoto build-up film (“ABF”).
16 . The package substrate of claim 13 , wherein surface roughness is an average roughness, R a , calculated using the following equation:
R
a
=
1
n
∑
i
=
1
n
y
i
wherein n is a positive integer that represents a number of surface samples measured, and y is a distance of a sample from a mean line of the surface.
17 . A system comprising:
a die; and a package substrate coupled to the die, the package substrate comprising:
a dielectric having a first surface, and a second surface disposed opposite to the first surface;
a first conductive feature formed on the first surface;
a second conductive feature formed on the second surface; and
a via filled with conductive material that extends from the second conductive feature through the dielectric to the first conductive feature;
wherein the second surface has a surface roughness between 40 nanometers and 75 nanometers, shaped at least in part by a surface of a previously-applied laminate.
18 . The system of claim 17 , further comprising a touch screen display coupled with the die and the package substrate.
19 . The system of claim 17 , wherein the system is a mobile electronic device.Join the waitlist — get patent alerts
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