Fluorine Gas Generation Apparatus

Abstract

A fluorine gas generating device comprises an electrolytic tank that generates at an anode side a main-product containing as a main component fluorine gas and at a cathode side a by-product gas containing as a main component hydrogen gas by subjecting, in an electrolytic bath, hydrogen fluoride in a molten salt containing therein hydrogen fluoride to an electrolysis; a hydrogen fluoride supply source that stores therein hydrogen fluoride that is to be fed to the electrolytic tank to fill up hydrogen fluoride; a hydrogen fluoride supply passage through which hydrogen fluoride flows from the hydrogen fluoride supply source to the electrolytic tank; and a vaporizer that is connected to the hydrogen fluoride supply passage to vaporize hydrogen fluoride supplied from the hydrogen fluoride supply source.

1 . A fluorine gas generating device that generates fluorine gas by subjecting hydrogen fluoride in a molten salt containing therein hydrogen fluoride to an electrolysis,
 which is characterized by an electrolytic tank that generates at an anode side a main-product containing as a main component fluorine gas and at a cathode side a by-product gas containing as a main component hydrogen gas by subjecting, in an electrolytic bath, hydrogen fluoride in a molten salt containing therein hydrogen fluoride to an electrolysis;   a hydrogen fluoride supply source that stores therein hydrogen fluoride that is to be fed to the electrolytic tank to fill up hydrogen fluoride;   a hydrogen fluoride supply passage through which hydrogen fluoride flows from the hydrogen fluoride supply source to the electrolytic tank; and,   a vaporizer that is connected to the hydrogen fluoride supply passage to vaporize hydrogen fluoride supplied from the hydrogen fluoride supply source.   
     
     
         2 . A fluorine gas generating device as claimed in  claim 1 , in which the vaporizer comprises:
 a hollow vessel that is equipped with a temperature adjuster and has therein a vaporizing chamber;   a hydrogen fluoride inlet portion that introduces thereinto liquefied hydrogen fluoride from the hydrogen fluoride supply source; and   a hydrogen fluoride outlet portion that discharges gaseous hydrogen fluoride from the vaporizing chamber.   
     
     
         3 . A fluorine gas generating device as claimed in  claim 1 , further comprises:
 a flow rate control valve that controls a flow rate of hydrogen fluoride led into the vaporizer;   a fluid level detecting means that detects a fluid level of hydrogen fluoride contained in the vaporizer; and   a control means that, in accordance with a detected output from the fluid level detecting means, controls an open degree of the flow rate control valve in such a manner as to cause the fluid level of hydrogen fluoride in the vaporizer to take a given level.   
     
     
         4 . A fluorine gas generating device as claimed in  claim 3 , in which the control means is configured to control that hydrogen fluoride is fed into the vaporizer from the hydrogen fluoride supply source in such a manner the fluid level of liquefied hydrogen fluoride in the vaporizer constantly keeps a given level. 
     
     
         5 . A fluorine gas generating device as claimed in  claim 1 , in which the fluid level detecting means is either one of a pressure detecting device that detects a pressure in the vaporizer and a fluid level detecting device that detects the fluid level of hydrogen fluoride in the vaporizer. 
     
     
         6 . A fluorine gas generating device as claimed in  claim 1 , in which both the electrolytic tank and the vaporizer are installed in a common housing.