Vibrator element, vibrator, oscillator, and electronic apparatus

Abstract

A quartz crystal vibrator element having the weight section is provided with the intermediate weight section formed to have an arm width W1 larger (thicker) than the arm width W of the vibrating arm section and smaller (thinner) than the arm width W2 of the tip weight section, thereby making the intermediate weight section follow the vibration (the amplitude) of the vibrating arm section. Further, the tip weight section formed to have an arm width W2 larger (thicker) than the arm width W1 of the intermediate weight section is provided, thereby making the tip weight section follow the vibration (the amplitude) of the vibrating arm section and the intermediate weight section. Therefore, the vibration characteristics of the vibrating arm section can be stabilized.

What is claimed is: 
     
         1 . A vibrator element comprising:
 a base part; and   a vibrating arm extending from the base to the first direction in plane-view,   a vibrating arm;   a tip weight part;   an arm extending from the base to the direction of the tip weight part, having a width that is formed along a second direction crossing the first direction that is narrower than the tip weight part, and being formed between the tip weight part and the base part in plane-view,   an intermediate weight part placed between the tip weight part and the arm part having a width formed along the second direction that is narrower than the tip weight part and larger than the arm part in plane-view;   a first widening part placed between the arm part and intermediate weight part in plane-view, the width formed along the second direction gradually widening from the arm part to the intermediate weight part, and having a different ratio change in width that is formed along the second direction per unit area of the first direction of the intermediate weight part.   
     
     
         2 . A vibrator element comprising:
 the vibrator arm according to  claim 1 ;   a second widening part placed between the arm part and the intermediate weight part connecting the intermediate weight part and the tip weight part, and the width formed along the second direction gradually widening from the intermediate weight part to the tip weight part in plane-view.   
     
     
         3 . A vibrator element according to  claim 1 , comprising:
 the vibrator arm, wherein   a groove is formed on the principal surface in plane-view.   
     
     
         4 . A vibrator element according to  claim 2 , comprising:
 the vibrator arm, wherein   a groove is formed on the principal surface in plane-view.   
     
     
         5 . A vibrator element according to  claim 1 , comprising:
 a supporting portion that is formed on the opposite side of the vibrator arm of the base in plane-view;   a connection part that connects the supporting part and the base part having a width formed along the second direction that is narrower than the base part.   
     
     
         6 . A vibrator element according to  claim 2 , comprising:
 a supporting portion that is formed on the opposite side of the vibrator arm of the base in plane-view;   a connection part that connects the supporting part and the base part having a width formed along the second direction that is narrower than the base part.   
     
     
         7 . A vibrator element according to  claim 4 , wherein a cut-out part is formed next to the connection part formed along the second direction, and is built between the base part and the supporting part. 
     
     
         8 . A vibrator element according to  claim 4 , wherein the supporting part extends towards the first direction and is next to the vibrator arm part that is formed along the second direction. 
     
     
         9 . A vibrator element comprising:
 the vibrator according to  claim 1 , and a package that stores the vibrator element.   
     
     
         10 . A vibrator element comprising:
 the vibrator according to  claim 2 , and a package that stores the vibrator element.   
     
     
         11 . An oscillator comprising:
 the vibrator element according to  claim 1  and a circuit section.   
     
     
         12 . A sensor comprising:
 the vibrator element according to  claim 1 .   
     
     
         13 . A sensor comprising:
 the vibrator element according to  claim 2 .   
     
     
         14 . An electronic apparatus comprising:
 the vibrator element according to  claim 1 .   
     
     
         15 . An electronic apparatus comprising:
 the vibrator element according to  claim 2 .