Polishing film
Abstract
The present invention provides a polishing film with which, even when water containing impurity ions is used as a polishing liquid, the abrasive particles comprising SiO 2 are less apt to adhere to the polished surface, e.g., the polished surface of an end of an optical fiber itself, and which is less apt to cause the optical loss attributable to scratches or edge chips in the polished surface. The polishing film hence renders good finish-polishing quality possible. This polishing film is characterized by comprising a substrate and an abrasive layer which has been disposed on a surface of the substrate and which comprises abrasive particles comprising SiO 2 , a binder resin, and an adhesion inhibitor containing a phosphorus compound.
Claims
exact text as granted — not AI-modified1 . A polishing film at least comprising: a substrate, and an abrasive layer that is arranged on a surface of the substrate, and that has abrasive particles containing SiO 2 , a binder resin, and an anti-adhesive agent containing a phosphorus compound.
2 . The polishing film according to claim 1 , wherein the phosphorus compound is a compound comprising a phosphate group and/or a phosphonate group.
3 . The polishing film according to claim 1 , for a substrate to be polished containing SiO 2 .
4 . The polishing film according to claim 2 , for a substrate to be polished containing SiO 2 .Join the waitlist — get patent alerts
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