Resonating element, resonator, electronic device, electronic apparatus, moving vehicle and method of manufacturing resonating element

Abstract

A piezoelectric resonating element includes a piezoelectric substrate having a rectangular vibrating portion and a thick-walled portion, excitation electrodes and, and lead electrodes. The thick-walled portion includes a fourth thick-walled portion, a third thick-walled portion, a first thick-walled portion, and a second thick-walled portion. The third thick-walled portion includes a third slope portion and a third thick-walled body, and at least one slit is formed in the third thick-walled portion.

What is claimed is: 
     
         1 . A resonating element comprising:
 a substrate, the substrate including:
 a vibrating portion that performs thickness-shear vibration, that has first and second main surfaces opposite to each other, the vibrating portion having first and second edges which are perpendicular to a vibration direction of the thickness-shear vibration, the vibrating portion having third and fourth edges which are parallel to the thickness-shear vibration, and the vibrating portion having a first thickness; 
 a first thick-walled portion that is located along the first edge of the vibrating portion so as to be connected to the vibrating portion, a thickness of the first thick-walled portion being thicker than the first thickness; 
 a second thick-walled portion that is located along the second edge of the vibrating portion so as to be connected to the vibrating portion, a thickness of the second thick-walled portion being thicker than the first thickness; and 
 a third thick-walled portion that is located along the third edge of the vibrating portion so as to be connected to the vibrating portion and the first and second thick-walled portions, a thickness of the third thick-walled portion being thicker than the first thickness; 
   a first excitation electrode that is formed on the first main surface of the vibrating portion; and   a second excitation electrode that is formed on the second main surface of the vibrating portion so as to overlap with the first excitation electrode via the vibrating portion in a plan view, wherein   the third thick-walled portion has first and second main surfaces opposite to each other, the first main surface of the vibrating portion being connected to the first main surface of the third thick-walled portion via a first slope, and the second main surface of the vibrating portion being connected to the second main surface of the third thick-walled portion via a second slope,   the first thick-walled portion having first and second main surfaces opposite to each other, the first main surface of the vibrating portion being connected to the first main surface of the first thick-walled portion via a third slope, and the second main surface of the vibrating portion and the second main surface of the first thick-walled portion are connected to each other so as to form a first even surface, and   the second thick-walled portion having first and second main surfaces opposite to each other, the second main surface of the vibrating portion being connected to the second main surface of the second thick-walled portion via a fourth slope, and the first main surface of the vibrating portion and the first main surface of the second thick-walled portion are connected to each other so as to form a second even surface.   
     
     
         2 . The resonating element according to  claim 1 , further comprising:
 a fourth thick-walled portion that is located along the fourth edge of the vibrating portion so as to be connected to the vibrating portion and the first and second thick-walled portions, a thickness of the fourth thick-walled portion being thicker than the first thickness, wherein   the fourth thick-walled portion has first and second main surfaces opposite to each other, the first main surface of the vibrating portion is connected to the first main surface of the fourth thick-walled portion via the first slope, and the second main surface of the vibrating portion is connected to the second main surface of the fourth thick-walled portion via the second slope.   
     
     
         3 . The resonating element according to  claim 1 , wherein
 an area of the vibrating portion that is sandwiched by the first and second excitation electrodes is in a circular shape in plan view.   
     
     
         4 . The resonating element according to  claim 2 , wherein
 an area of the vibrating portion that is sandwiched by the first and second excitation electrodes is in a circular shape in plan view.   
     
     
         5 . The resonating element according to  claim 1 , wherein
 an area of the vibrating portion that is sandwiched by the first and second excitation electrodes is in one of an elliptical shape and an oval shape in plan view.   
     
     
         6 . The resonating element according to  claim 2 , wherein
 an area of the vibrating portion that is sandwiched by the first and second excitation electrodes is in one of an elliptical shape and an oval shape in plan view.   
     
     
         7 . The resonating element according to  claim 1 , wherein
 the substrate is a rotated Y-cut quartz crystal substrate.   
     
     
         8 . The resonating element according to  claim 2 , wherein
 the substrate is a rotated Y-cut quartz crystal substrate.   
     
     
         9 . The resonating element according to  claim 7 , wherein
 the rotated Y-cut quartz crystal substrate is an AT-cut quartz crystal substrate.   
     
     
         10 . The resonating element according to  claim 8 , wherein
 the rotated Y-cut quartz crystal substrate is an AT-cut quartz crystal substrate.   
     
     
         11 . The resonating element according to  claim 1 , wherein
 the third edge of the vibrating portion is on a positive X-axis side with respect to the fourth edge of the vibrating portion in plan view.   
     
     
         12 . The resonating element according to  claim 2 , wherein
 the third edge of the vibrating portion is on a positive X-axis side with respect to the fourth edge of the vibrating portion in plan view.   
     
     
         13 . The resonating element according to  claim 1 , wherein
 the fourth edge of the vibrating portion is on a negative X-axis side with respect to the third edge of the vibrating portion in plan view.   
     
     
         14 . The resonating element according to  claim 2 , wherein
 the fourth edge of the vibrating portion is on a negative X-axis side with respect to the third edge of the vibrating portion in the view.   
     
     
         15 . A resonator comprising:
 the resonating element according to  claim 1 ; and   a package that accommodates the resonating element.   
     
     
         16 . A resonator comprising:
 the resonating element according to  claim 2 ; and   a package that accommodates the resonating element.   
     
     
         17 . The resonator according to  claim 15 , wherein
 the third thick-walled portion is mounted on an inner surface of the package.   
     
     
         18 . The resonator according to  claim 16 , wherein
 the third thick-walled portion is mounted on an inner surface of the package.   
     
     
         19 . An electronic device comprising:
 the resonating element according to  claim 1 ; and   a circuit.   
     
     
         20 . An electronic device comprising:
 the resonating element according to  claim 2 ; and   a circuit.   
     
     
         21 . An electronic device comprising:
 the resonating element according to  claim 1 ; and   an electronic component.   
     
     
         22 . An electronic device comprising:
 the resonating element according to  claim 2 ; and   an electronic component.   
     
     
         23 . An electronic apparatus comprising:
 the resonating element according to  claim 1 .   
     
     
         24 . An electronic apparatus comprising:
 the resonating element according to  claim 2 .   
     
     
         25 . A mobile body comprising:
 the resonating element according to  claim 1 .   
     
     
         26 . A mobile body comprising:
 the resonating element according to  claim 2 .