Display unit, manufacturing method thereof, and electronic apparatus

Abstract

Provided is a display unit that includes: a laminated structure including two first wirings, a first insulating layer, and a concave part, in which the first wirings are adjacent to each other, the first insulating layer is provided on the first wirings and is made of an organic material, and the concave part penetrates, between the first wirings, from the first insulating layer to the first wirings in a laminated direction; and a second insulating layer provided in the concave part and on the laminated structure.

The invention is claimed as follows: 
     
         1 . A display unit comprising:
 a laminated structure including two first wirings, a first insulating layer, and a concave part, the first wirings being adjacent to each other, the first insulating layer being provided on the first wirings and being made of an organic material, and the concave part penetrating, between the first wirings, from the first insulating layer to the first wirings in a laminated direction; and   a second insulating layer provided in the concave part and on the laminated structure.   
     
     
         2 . The display unit according to  claim 1 , further comprising a second wiring provided between the first insulating layer and the second insulating layer,
 wherein the first insulating layer includes a step between a lower part of the second wiring and a region of the first insulating layer excluding the lower part.   
     
     
         3 . The display unit according to  claim 1 , wherein one or both of the first wirings is a gate electrode, is a source electrode, a drain electrode, or both, or is a plurality of metal layers configuring a multilayer wiring layer. 
     
     
         4 . The display unit according to  claim 3 , wherein
 the multilayer wiring layer includes an inter-layer insulating layer made of an organic material, and   the metal layers are arranged to be substantially orthogonal with respect to each other with the inter-layer insulating layer interposed in between.   
     
     
         5 . The display unit according to  claim 1 , wherein the concave part is formed at a short-circuit part of the first wirings. 
     
     
         6 . The display unit according to  claim 1 , wherein the second insulating layer is made of an organic material. 
     
     
         7 . A method of manufacturing a display unit, the method comprising:
 forming a laminated structure including, in recited order, two first wirings and a first insulating layer, the first wirings being adjacent to each other and the first insulating layer being made of an organic material;   forming a concave part that penetrates from the first insulating layer to the first wirings in a laminated direction, by applying laser light from a side on which the first insulating layer is provided to a short-circuit part formed between the first wirings;   performing half-ashing on an irradiation surface of the laser light and a peripheral region that includes the irradiation surface; and   forming a second insulating layer in the concave part and on the laminated structure after the performing the half-ashing.   
     
     
         8 . The method of manufacturing the display unit according to  claim 7 , further comprising, after the forming the concave part, applying laser light having a narrower irradiation width than an irradiation width of the laser light to a bottom surface of the concave part, to a start point of the laser application, and to an end point of the laser application. 
     
     
         9 . The method of manufacturing the display unit according to  claim 7 , wherein the performing the half-ashing includes performing a plasma treatment. 
     
     
         10 . The method of manufacturing the display unit according to  claim 9 , wherein oxygen is used in the plasma treatment. 
     
     
         11 . The method of manufacturing the display unit according to  claim 7 , wherein the laser light has a wavelength in a range from about 10 nm to about 400 nm. 
     
     
         12 . An electronic apparatus provided with a display unit, the display unit comprising:
 a laminated structure including two first wirings, a first insulating layer, and a concave part, the first wirings being adjacent to each other, the first insulating layer being provided on the first wirings and being made of an organic material, and the concave part penetrating, between the first wirings, from the first insulating layer to the first wirings in a laminated direction; and   a second insulating layer provided in the concave part and on the laminated structure.