Surface acoustic wave device, electronic apparatus, and sensor apparatus

Abstract

A SAW device includes an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between electrode fingers of the IDT. An IDT line occupancy η and an inter-electrode-finger groove depth G satisfy a predetermined relationship in terms of the wavelength λ, such that the SAW device has a frequency-temperature characteristic of a cubic curve having an inflection point between a maximum value and a minimum value in an operation temperature range. The inflection point is adjustable to a desired temperature or a desired temperature range depending on the IDT line occupancy η within an operation temperature range.

1 . A surface acoustic wave device comprising:
 a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3));   an IDT which has a plurality of electrode fingers in the principal surface of the quartz crystal substrate and excites a Rayleigh wave in a stopband upper endmode, each of the plurality of electrode fingers being separated by a groove having a trapezoidal cross-sectional shape; and   a pair of reflectors on opposing sides of the IDT,   wherein a frequency-temperature characteristic is expressed by a curve having a maximum value, a minimum value, and an inflection point between the maximum value and the minimum value, and the temperature of the inflection point is adjustable depending on an IDT line occupancy so as to be within a desired operation temperature range.   
     
     
         2 . A surface acoustic wave device comprising:
 a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3)); and   an IDT which has a plurality of electrode fingers on the principal surface of the quartz crystal substrate and excites a Rayleigh wave in a stopband upper end mode,   wherein inter-electrode-finger grooves having a trapezoidal cross section shape are recessed in the surface of the quartz crystal substrate between adjacent electrode fingers of the IDT,   the wavelength λ of the Rayleigh wave and the depth G of the inter-electrode-finger grooves satisfy 0.01λ≦G≦0.07λ,   an IDT line occupancy η and the depth G of the inter-electrode-finger grooves satisfy the following relationships:
   −2.0000× G/λ+ 0.7200≦η≦−2.5000× G/λ+ 0.7775 where 0.0100λ≦ G≦ 0.0500λ;
 
   −3.5898× G/λ+ 0.7995≦η≦−2.5000× G/λ+ 0.7775 where 0.0500λ≦ G≦ 0.0695λ;
 
   
       and
 a frequency-temperature characteristic is expressed by a curve having a maximumvalue, a minimumvalue, and an inflection point between the maximum value and the minimum value, and the temperature of the inflection point is adjustable depending on the IDT line occupancy so as to be within a range of ±30° C. from the center temperature Tc of a desired operation temperature range. 
 
     
     
         3 . The surface acoustic wave device according to  claim 2 ,
 wherein the IDT line occupancy η satisfies the following relationship:
     a ( Tc− 30) 6   +b ( Tc− 30) 5   +c ( Tc− 30) 4   +d ( Tc− 30) 3   +e ( Tc− 30) 2   +f ( Tc− 30)+0.606≦η≦ a ( Tc+ 30) 6   +b ( Tc+ 30) 5   +c ( Tc+ 30) 4   +d ( Tc+ 30) 3   +e ( Tc+ 30) 2   +f ( Tc+ 30)+0.606,
 
   
       (where a=−2.60×10 −12 , b=4.84×10 −10 , c=−2.13×10 −8 , d=1.98×10 −7 , e=1.42×10 −5 , f=1.48×10 −4 ). 
     
     
         4 . The surface acoustic wave device according to  claim 2 ,
 wherein the Euler angle ψ of the quartz crystal substrate is within a range of 42.79°≦|ψ|≦149.57°.   
     
     
         5 . The surface acoustic wave device according to  claim 2 ,
 wherein the IDT line occupancy η satisfies the following relationship:
   η=−1963.05×( G /λ) 3 +196.28×( G /λ) 2 −6.53×( G /λ)−135.99×( H /λ) 2 +5.817×( H /λ)+0.732−99.99×( G /λ)×( H /λ),
 
   where H is a thickness of the electrode fingers.   
     
     
         6 . The surface acoustic wave device according to  claim 4 ,
 wherein the IDT line occupancy η satisfies the following relationship:
   η=−1963.05×( G /λ) 3 +196.28×( G /λ) 2 6.53×( G /λ)−135.99×( H /λ) 2 +5.817×( H /λ)+0.732−99.99×( G /λ)×( H /λ),
 
   where H is a thickness of the electrode fingers.   
     
     
         7 . The surface acoustic wave device according to  claim 2 ,
 wherein the sum of the depth G of the inter-electrode-finger groove and a thickness H of the electrode fingers satisfies 0.0407λ≦G+H.   
     
     
         8 . The surface acoustic wave device according to  claim 4 ,
 wherein the sum of the depth G of the inter-electrode-finger grooves and a thickness H of the electrode fingers satisfies 0.0407λ≦G+H.   
     
     
         9 . The surface acoustic wave device according to  claim 5 ,
 wherein the sum of the depth G of the inter-electrode-finger grooves and a thickness H of the electrode fingers satisfies 0.0407λ≦G+H.   
     
     
         10 . The surface acoustic wave device according to  claim 2 , further comprising:
 a pair of reflectors which respectively have a plurality of conductor strips on the principal surface of the quartz crystal substrate and are arranged on both sides of the IDT with the IDT sandwiched therebetween along an SAW propagation direction,   wherein inter-conductor-strip grooves are recessed in the surface of the quartz crystal substrate between adjacent conductor strips of the reflectors,   an angle between a first direction perpendicular to the electrode fingers and the conductor strips and the electrical axis of the quartz crystal substrate is the Euler angle ψ of the quartz crystal substrate,   at least apart of the IDT and the reflectors is arranged in a second direction intersecting the first direction at an angle δ, and   the angle δ is set to be within a power flow angle ±1° of the quartz crystal substrate.   
     
     
         11 . The surface acoustic wave device according to  claim 4 , further comprising:
 a pair of reflectors which respectively have a plurality of conductor strips on the principal surface of the quartz crystal substrate and are arranged on both sides of the IDT with the IDT sandwiched therebetween along an SAW propagation direction,   wherein inter-conductor-strip grooves are recessed in the surface of the quartz crystal substrate between adjacent conductor strips of the reflectors,   an angle between a first direction perpendicular to the electrode fingers and the conductor strips and the electrical axis of the quartz crystal substrate is the Euler angle ψ of the quartz crystal substrate,   at least apart of the IDT and the reflectors is arranged in a second direction intersecting the first direction at an angle δ, and   the angle δ is set to be within a range of a power flow angle ±1° of the quartz crystal substrate.   
     
     
         12 . The surface acoustic wave device according to  claim 5 , further comprising:
 a pair of reflectors which respectively have a plurality of conductor strips on the principal surface of the quartz crystal substrate and are arranged on both sides of the IDT with the IDT sandwiched therebetween along an SAW propagation direction,   wherein inter-conductor-strip grooves are recessed in the surface of the quartz crystal substrate between adjacent conductor strips of the reflectors,   an angle between a first direction perpendicular to the electrode fingers and the conductor strips and the electrical axis of the quartz crystal substrate is the Euler angle ψ of the quartz crystal substrate,   at least apart of the IDT and the reflectors is arranged in a second direction intersecting the first direction at an angle δ, and   the angle δ is set to be within a power flow angle ±1° of the quartz crystal substrate.   
     
     
         13 . The surface acoustic wave device according to  claim 6 , further comprising:
 a pair of reflectors which respectively have a plurality of conductor strips on the principal surface of the quartz crystal substrate and are arranged on both sides of the IDT with the IDT sandwiched therebetween along an SAW propagation direction,   wherein inter-conductor-strip grooves are recessed in the surface of the quartz crystal substrate between adjacent conductor strips of the reflectors,   an angle between a first direction perpendicular to the electrode fingers and the conductor strips and the electrical axis of the quartz crystal substrate is the Euler angle ψ of the quartz crystal substrate,   at least apart of the IDT and the reflectors is arranged in a second direction intersecting the first direction at an angle δ, and   the angle δ is set to be within a power flow angle ±1° of the quartz crystal substrate.   
     
     
         14 . The surface acoustic wave device according to  claim 1 , further comprising:
 an IC which drives the IDT.   
     
     
         15 . An electronic apparatus comprising:
 the surface acoustic wave device according to  claim 1 .   
     
     
         16 . A sensor apparatus comprising:
 the surface acoustic wave device according to  claim 1 .   
     
     
         17 . The surface acoustic wave device according to  claim 3 ,
 wherein the Euler angle ψ of the quartz crystal substrate is within a range of 42.79°≦|ψ|≦49.57°.   
     
     
         18 . The surface acoustic wave device according to  claim 3 ,
 wherein the IDT line occupancy η satisfies the following relationship:
   η=−1963.05×( G /λ) 3 +196.28×( G /λ) 2 −6.53×( G /λ)−135.99×( H /λ) 2 +5.817×( H /λ)+0.732−99.99×( G /λ)×( H /λ),
 
   where H is a thickness of the electrode fingers.   
     
     
         19 . The surface acoustic wave device according to  claim 3 ,
 wherein the sum of the depth G of the inter-electrode-finger groove and a thickness H of the electrode fingers satisfies 0.0407λ≦G+H.   
     
     
         20 . The surface acoustic wave device according to  claim 3 , further comprising:
 a pair of reflectors which respectively have a plurality of conductor strips on the principal surface of the quartz crystal substrate and are arranged on both sides of the IDT with the IDT sandwiched therebetween along an SAW propagation direction,   wherein inter-conductor-strip grooves are recessed in the surface of the quartz crystal substrate between adjacent conductor strips of the reflectors,   an angle between a first direction perpendicular to the electrode fingers and the conductor strips and the electrical axis of the quartz crystal substrate is the Euler angle ψ of the quartz crystal substrate,   at least apart of the IDT and the reflectors is arranged in a second direction intersecting the first direction at an angle δ, and   the angle δ is set to be within a power flow angle ±1° of the quartz crystal substrate.   
     
     
         21 . The surface acoustic wave device according to  claim 2 , further comprising:
 an IC which drives the IDT.   
     
     
         22 . The surface acoustic wave device according to  claim 3 , further comprising:
 an IC which drives the IDT.   
     
     
         23 . An electronic apparatus comprising:
 the surface acoustic wave device according to  claim 2 .   
     
     
         24 . An electronic apparatus comprising:
 the surface acoustic wave device according to  claim 3 .   
     
     
         25 . A sensor apparatus comprising:
 the surface acoustic wave device according to  claim 2 .   
     
     
         26 . A sensor apparatus comprising:
 the surface acoustic wave device according to  claim 3 .