Method for producing metal filters

Abstract

A method for producing a metal filter comprises a lamination step, an exposure step, a development step, a plating step, a dissolution step, and a stripping step. The method is useful because it is possible to produce a metal filter in which there are not damages such as wrinkles, folds, scars, and curls and deformation of fine through-holes.

1 . A method for producing a metal filter comprising:
 a lamination step of laminating a photosensitive resin composition on a copper substrate to form a photosensitive resin composition layer;   an exposure step of irradiating a predetermined portion of the photosensitive resin composition layer with an active light and light-curing the exposed portion to form a cured material of the photosensitive resin composition;   a development step of removing a portion other than the cured material of the photosensitive resin composition of the photosensitive resin composition layer by development to form a resist pattern composed of the cured material of the photosensitive resin composition on the copper substrate;   a plating step of metal plating the resist-patterned copper substrate to form a plated layer;   a dissolution step of removing the copper substrate with chemical dissolution to obtain a structure composed of the plated layer and the cured material of the photosensitive resin composition; and   a stripping step of removing the cured material of the photosensitive resin composition from the structure to obtain the plated layer;   wherein the plated layer is the metal filter.   
     
     
         2 . The method for producing a metal filter according to  claim 1 , wherein the metal filter has a plurality of through-holes, and wherein the opening shape of the through-hole is one or more shapes selected from the group consisting of circle, ellipse, rounded rectangle, rectangle, and square. 
     
     
         3 . The method for producing a metal filter according to  claim 1 , wherein the opening shape of the through-hole comprises a rectangular or rounded-rectangular shape, and wherein the length of the short side of the rectangle or rounded rectangle is 5 to 15 μm. 
     
     
         4 . The method for producing a metal filter according to  claim 1 , wherein the metal filter is of a thickness of 3 to 50 μm. 
     
     
         5 . The method for producing a metal filter according to  claim 1 , wherein the copper substrate is peelable copper foil. 
     
     
         6 . The method for producing a metal filter according to  claim 1 , wherein the metal filter is a metal filter for concentration of cancer cells. 
     
     
         7 . The method for producing a metal filter according to  claim 6 , wherein the metal filter for concentration of cancer cells is a metal filter for concentration of cancer cells circulating in blood. 
     
     
         8 . The method for producing a metal filter according to  claim 1 , wherein the thickness of the plated layer is thinner than the thickness of the photosensitive resin composition layer. 
     
     
         9 . The method for producing a metal filter according to  claim 3 , wherein the metal filter is of a thickness of 3 to 50 μm. 
     
     
         10 . The method for producing a metal filter according to  claim 3 , wherein the copper substrate is peelable copper foil. 
     
     
         11 . The method for producing a metal filter according to  claim 3 , wherein the metal filter is a metal filter for concentration of cancer cells. 
     
     
         12 . The method for producing a metal filter according to  claim 11 , wherein the metal filter for concentration of cancer cells is a metal filter for concentration of cancer cells circulating in blood. 
     
     
         13 . The method for producing a metal filter according to  claim 3 , wherein the thickness of the plated layer is thinner than the thickness of the photosensitive resin composition layer. 
     
     
         14 . The method for producing a metal filter according to  claim 4 , wherein the copper substrate is peelable copper foil. 
     
     
         15 . The method for producing a metal filter according to  claim 4 , wherein the metal filter is a metal filter for concentration of cancer cells. 
     
     
         16 . The method for producing a metal filter according to  claim 15 , wherein the metal filter for concentration of cancer cells is a metal filter for concentration of cancer cells circulating in blood. 
     
     
         17 . The method for producing a metal filter according to  claim 4 , wherein the thickness of the plated layer is thinner than the thickness of the photosensitive resin composition layer. 
     
     
         18 . The method for producing a metal filter according to  claim 5 , wherein the metal filter is a metal filter for concentration of cancer cells. 
     
     
         19 . The method for producing a metal filter according to  claim 18 , wherein the metal filter for concentration of cancer cells is a metal filter for concentration of cancer cells circulating in blood. 
     
     
         20 . The method for producing a metal filter according to  claim 5 , wherein the thickness of the plated layer is thinner than the thickness of the photosensitive resin composition layer.