Heat dissipation unit and manufacturing method thereof and thermal module thereof

Abstract

A heat dissipation unit and a manufacturing method thereof and a thermal module thereof. The heat dissipation unit includes a metal main body having a chamber, an oxide coating and a working fluid. The oxide coating is coated on wall surface of the chamber instead of capillary structure. The oxide coating serves to enhance vapor/liquid circulation efficiency of the working fluid in the chamber of the heat dissipation unit so as to increase heat dissipation efficiency.

1 - 5 . (canceled) 
     
     
         6 . A manufacturing method of a heat dissipation unit, comprising steps of:
 preparing a heat dissipation unit with a chamber;   coating wall surface of the chamber of the heat dissipation unit with at least one layer of oxide coating;   vacuuming the heat dissipation unit and filling working fluid into the chamber; and   sealing the heat dissipation unit.   
     
     
         7 . The manufacturing method of the heat dissipation unit as claimed in  claim 6 , wherein the oxide coating is selected from a group consisting of silicon oxide (SiO2), titanium oxide (TiO2), aluminum oxide (Al2O3), zirconium oxide (ZrO2), calcium oxide (CaO), potassium oxide (K2O) and zinc oxide (ZnO). 
     
     
         8 . The manufacturing method of the heat dissipation unit as claimed in  claim 6 , wherein the oxide coating is a hydrophobic coating or a hydrophilic coating. 
     
     
         9 . The manufacturing method of the heat dissipation unit as claimed in  claim 6 , wherein the heat dissipation unit is selected from a group consisting of heat pipe, heat spreader, thin heat pipe and flat-plate heat pipe. 
     
     
         10 . The manufacturing method of the heat dissipation unit as claimed in  claim 6 , wherein the heat dissipation unit is made of a material selected from a group consisting of copper, aluminum, nickel and stainless steel. 
     
     
         11 . The manufacturing method of the heat dissipation unit as claimed in  claim 6 , wherein the oxide coating is coated on the wall surface of the chamber of the heat dissipation unit by means of physical vapor deposition (PVD). 
     
     
         12 . The manufacturing method of the heat dissipation unit as claimed in  claim 6 , wherein the oxide coating is coated on the wall surface of the chamber of the heat dissipation unit by means of chemical vapor deposition (CVD). 
     
     
         13 . The manufacturing method of the heat dissipation unit as claimed in  claim 6 , wherein the oxide coating is coated on the wall surface of the chamber of the heat dissipation unit by means of sol-gel process. 
     
     
         14 . The manufacturing method of the heat dissipation unit as claimed in  claim 13 , wherein the sol-gel process is selected from the group consisting of sol-gel dipping process, sol-gel deposition process, sol-gel spin-coating process, sol-gel painting-on process and sol-gel wetting process. 
     
     
         15 - 18 . (canceled)