Array description system for large patterns

Abstract

A method for describing an array of elements includes the steps of providing an array description system that includes a library of possible alternative designations; and describing the array of elements using at least one of the alternative designations. The library of possible alternative designations includes one or more of the following (i) a line designation, (ii) a column designation, (iii) a square designation, (iv) a rectangle designation, (v) a cross designation, (vi) a diagonal designation, (vii) a complex designation, (viii) a mosaic designation, (ix) an overlap designation, (x) a power designation, (xi) a border designation, (xii) a corner flip designation, (xiii) a mirror image designation, (xiv) a repeat designation, and (xv) a glide designation.

What is claimed is: 
     
         1 . A method for describing an array of elements, the method comprising:
 providing an array description system that includes a library of possible alternative designations; and   describing the array of elements using at least one of the alternative designations.   
     
     
         2 . The method of  claim 1  wherein the library of possible alternative designations includes at least one of the following (i) a line designation, (ii) a column designation, (iii) a square designation, (iv) a rectangle designation, (v) a cross designation, (vi) a diagonal designation, (vii) a complex designation, (viii) a mosaic designation, (ix) an overlap designation, (x) a power designation, (xi) a border designation, (xii) a corner flip designation, (xiii) a mirror image designation, (xiv) a repeat designation, and (xv) a glide designation. 
     
     
         3 . The method of  claim 1  wherein the library of possible alternative designations includes at least two of the following (i) a line designation, (ii) a column designation, (iii) a square designation, (iv) a rectangle designation, (v) a cross designation, (vi) a diagonal designation, (vii) a complex designation, (viii) a mosaic designation, (ix) an overlap designation, (x) a power designation, (xi) a border designation, (xii) a corner flip designation, (xiii) a mirror image designation, (xiv) a repeat designation, and (xv) a glide designation. 
     
     
         4 . The method of  claim 1  wherein the library of possible alternative designations includes at least three of the following (i) a line designation, (ii) a column designation, (iii) a square designation, (iv) a rectangle designation, (v) a cross designation, (vi) a diagonal designation, (vii) a complex designation, (viii) a mosaic designation, (ix) an overlap designation, (x) a power designation, (xi) a border designation, (xii) a corner flip designation, (xiii) a mirror image designation, (xiv) a repeat designation, and (xv) a glide designation. 
     
     
         5 . The method of  claim 1  wherein the library of possible alternative designations includes at least four of the following (i) a line designation, (ii) a column designation, (iii) a square designation, (iv) a rectangle designation, (v) a cross designation, (vi) a diagonal designation, (vii) a complex designation, (viii) a mosaic designation, (ix) an overlap designation, (x) a power designation, (xi) a border designation, (xii) a corner flip designation, (xiii) a mirror image designation, (xiv) a repeat designation, and (xv) a glide designation. 
     
     
         6 . The method of  claim 1  wherein the array of elements is a binary array, and wherein the description system includes a first element designation and a second element designation. 
     
     
         7 . The method of  claim 1  wherein the library of possible alternative designations include a classification of patterns. 
     
     
         8 . The method of  claim 7  wherein the classification of patterns includes at least one of the following (i) a line designation, (ii) a column designation, (iii) a square designation, (iv) a rectangle designation, (v) a cross designation, (vi) a diagonal designation, (vii) a complex designation, (viii) a mosaic designation, (ix) an overlap designation, (x) a power designation, (xi) a border designation, (xii) a corner flip designation, (xiii) a mirror image designation, (xiv) a repeat designation, and (xv) a glide designation. 
     
     
         9 . The method of  claim 7  wherein the describing the array of elements includes selecting the classification of patterns. 
     
     
         10 . An exposure method for exposing a workpiece with exposure light via array of elements, comprising:
 setting at least one of the array of elements using the method of  claim 1 , and   exposing the workpiece with exposure light via the array of elements.   
     
     
         11 . A device manufacturing method comprising:
 forming a pattern of a photosensitive layer on the substrate, using the exposure method as defined in  claim 10 ; and   processing the substrate with the pattern formed thereon.   
     
     
         12 . An exposure apparatus for exposing a workpiece with exposure light via a projection optical system, comprising:
 an array of elements which is arranged on the object side of the projection optical system, each of which is controllable so as to guide the exposure light to the projection optical system; and   a control device for driving the array of elements,   wherein the control device set the array of elements using the describing method of  claim 1 .   
     
     
         13 . A data structure that describes an array of elements that includes a plurality of element, with each element having one state among a plurality states, the data structure comprising:
 a classification of patterns; and   a state about the element.   
     
     
         14 . The data structure of  claim 13 , wherein the classification of patterns comprising a category type. 
     
     
         15 . The data structure of  claim 14 , further comprising a rotation. 
     
     
         16 . The data structure of  claim 15 , further comprising an elements number. 
     
     
         17 . The data structure of  claim 16 , wherein the state about the element correspond to the elements number. 
     
     
         18 . The data structure of  claim 13 , wherein each element of the array of elements displays two states.