Liquid crystal display device and manufacturing method for same

Abstract

The present invention provides a liquid crystal display device having gate wires and source/drain wires with a multilayer structure made of the same material which can be manufactured at low cost, as well as a manufacturing method for the same. In accordance with the manufacturing method, a wet etching process is carried out on the gate wires and the source/drain wires using an etchant including hydrofluoric acid and an oxidant, and the concentration of hydrofluoric acid in the etchant is different between the etchant for the gate wires and that for the source/drain wires.

What is claimed is: 
     
         1 . A liquid crystal display device having gate wires and source/drain wires, each with a multilayer structure and made of the same material, characterized in that the angle of the taper of the gate wires is smaller than the angle of the taper of the source/drain wires. 
     
     
         2 . A liquid crystal display device having gate wires and source/drain wires, each with a multilayer structure and made of the same material,
 characterized in that the angle of the taper of the gate wires is smaller than the angle of the taper of the source/drain wires, and   characterized in that a wet etching process is carried out on the gate wires and the source/drain wires using an etchant including hydrofluoric acid and an oxidant, where a concentration of hydrofluoric acid in the etchant for the gate wires is different from a concentration of hydrofluoric acid in the etchant for the source/drain wires.   
     
     
         3 . The liquid crystal display device according to  claim 1 , wherein the angle of the taper of the gate wires is 45° or less, and the angle of the taper of the source/drain wires is 45° or more, but greater than the angle of the taper of the gate wires. 
     
     
         4 . The liquid crystal display device according to  claim 3 , wherein the angle of the taper of the gate wires is 20° to 30°. 
     
     
         5 . The liquid crystal display device according to  claim 3 , wherein the angle of the taper of the source/drain wires is 60° to 70°. 
     
     
         6 . The liquid crystal display device according to  claim 1 , characterized in that titanium, aluminum or an alloy thereof and titanium are layered in sequence in the multilayer structure. 
     
     
         7 . The liquid crystal display device according to  claim 6 , wherein the alloy of aluminum is AlSi or AlCu.