Multi-dopant permeation tube

Abstract

Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber 5 and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.

What is claimed is: 
     
         1 . A dopant delivery device configured to supply dopants to a spectrometry system, the dopant delivery device comprising:
 a tube including:
 a first chamber defined by a first portion of a wall of the tube, and 
 a second chamber defined by a second portion of the wall of the tube; 
   a first plug disposed within the tube, the first plug separating the first chamber from the second chamber;   a first dopant source included in the first chamber; and   a second dopant source included in the second chamber.   
     
     
         2 . The dopant delivery device of  claim 1 , wherein the first chamber is further defined by a second plug inserted into tube proximate a first end of the tube. 
     
     
         3 . The dopant delivery device of  claim 2 , wherein the second chamber is further defined by a third plug inserted into tube proximate a second end of the tube. 
     
     
         4 . The dopant delivery device of  claim 3 , wherein a bore is defined in one of the second plug and the third plug. 
     
     
         5 . The dopant delivery device of  claim 3 , wherein one of the first plug, the second plug, and the third plug is secured in place within the tube by a collar which exerts a compressive force on an outside surface of the tube. 
     
     
         6 . The dopant delivery device of  claim 3 , wherein one of the first plug, the second plug, and the third plug provide an interference fit inside the tube. 
     
     
         7 . The dopant delivery device of  claim 1 , wherein the first dopant source comprises dichloromethane liquid. 
     
     
         8 . The dopant delivery device of  claim 7 , wherein the first portion of the wall of the tube is permeable to dichloromethane vapor. 
     
     
         9 . The dopant delivery device of  claim 1 , wherein the second dopant source comprises an ammonia solid. 
     
     
         10 . The dopant delivery device of  claim 9 , configured to emit both dichloromethane vapor and ammonia vapor. 
     
     
         11 . The dopant delivery device of  claim 1 , configured to provide a visual indication of an expiration of the supply of one of the first dopant source and the second dopant source. 
     
     
         12 . The dopant delivery device of  claim 11 , further comprising an indicator material which changes color in the presence of one of the first dopant and the second dopant. 
     
     
         13 . The dopant delivery device of  claim 11 , wherein the visual indication includes a visual indication of a fluid level of dichloromethane liquid. 
     
     
         14 . The dopant delivery device of  claim 1 , wherein a portion of the wall of the tube is porous. 
     
     
         15 . The dopant delivery device of  claim 1 , wherein the first portion of the wall of the tube is contiguous with the second portion of the wall of the tube. 
     
     
         16 . The dopant delivery device of  claim 1 , wherein the first plug seals the first chamber from the second chamber. 
     
     
         17 . The dopant delivery device of  claim 1 , wherein the first plug comprises a rod having a diameter approximately equal to an inside diameter of the tube. 
     
     
         18 . A method of making a dopant delivery device, the method comprising:
 loading a first quantity of a first dopant into a first chamber of a tube, the first chamber being defined by a first portion of a wall of the tube; and   loading a second quantity of a second dopant into a second chamber of the tube defined by a second portion of the wall of the tube, a plug disposed within the tube separating the first chamber from the second chamber.   
     
     
         19 . An apparatus configured to supply dopants to a spectrometry system, the apparatus comprising:
 a first chamber having a first wall contiguous with a second wall of a second chamber;   the first chamber configured to retain a first dopant source and to release a first dopant from the first dopant source from an internal volume of the first chamber; and   the second chamber configured to retain a second dopant source and to release a second dopant from the second dopant source from an internal volume of the second chamber.   
     
     
         20 . The apparatus of  claim 19 , wherein the first chamber has a dimension which differs from a corresponding dimension of the second chamber. 
     
     
         21 . The apparatus of  claim 19 , configured to be mounted in a port of the spectrometry system and to deliver the first dopant and the second dopant into the spectrometry system from within the port. 
     
     
         22 . The apparatus of  claim 19 , wherein the first wall of the first chamber is formed of a material different from a material of which the second wall of the second chamber is formed.