Overhead substrate handling and storage system

Abstract

A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.

1 .- 23 . (canceled) 
     
     
         24 . A material handling system, comprising:
 an overhead rack defining a plurality of storage positions, said overhead rack having an outer perimeter;   at least one interior window defined in said overhead rack within an interior region of said overhead rack inside of said outer perimeter of said overhead rack; and   at least one transport vehicle that is adapted to access a first load port of a first tool, wherein said first load port is positioned below said at least one interior window.   
     
     
         25 . The system of  claim 24 , further comprising at least one periphery window defined in said overhead rack adjacent an outer edge of said outer perimeter of said overhead rack. 
     
     
         26 . The system of  claim 24 , wherein said at least one transport vehicle is further adapted to access a second load port of said first tool, wherein said second load port is positioned below said at least one periphery window. 
     
     
         27 . The system of  claim 24 , wherein said at least one transport vehicle is further adapted to access a second load port of a second tool, wherein said second load port of said second tool is positioned below said at least one periphery window. 
     
     
         28 . The system of  claim 26 , wherein one of said first and second load ports is adapted to receive a front opening unified pod (FOUP) and the other of said first and second load ports is adapted to receive a wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod. 
     
     
         29 . The system of  claim 27 , wherein one of said first and second load ports is adapted to receive a front opening unified pod (FOUP) and the other of said first and second load ports is adapted to receive a wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod. 
     
     
         30 . The system of  claim 27 , wherein said at least one transport vehicle is further adapted to rotate a wafer pod when accessing said first load port, such that said wafer pod may be aligned at any angle relative to a reference surface of said first tool. 
     
     
         31 . A material handling system, comprising:
 an overhead rack defining a plurality of storage positions, said overhead rack having an outer perimeter;   a plurality of interior windows defined in said overhead rack within an interior region of said overhead rack inside of said outer perimeter of said overhead rack;   a plurality of load ports that are adapted to receive a wafer carrier, wherein each of said plurality of load ports is positioned below one of said plurality of interior windows, and wherein said plurality of load ports are arranged in a non-linear relationship; and   at least one transport vehicle that is adapted to access at least some of said plurality of load ports.   
     
     
         32 . The system of  claim 31 , further comprising at least one periphery window defined in said overhead rack adjacent an outer edge of said outer perimeter of said overhead rack. 
     
     
         33 . The system of  claim 32 , wherein said at least one transport vehicle is further adapted to access one of said plurality of ports that is positioned below said at least one periphery window. 
     
     
         34 . The system of  claim 31 , wherein said at least one transport vehicle is adapted to access each of said plurality of load ports. 
     
     
         35 . The system of  claim 31 , wherein said plurality of load ports are positioned on a single tool. 
     
     
         36 . The system of  claim 31 , wherein said plurality of load ports are positioned on at least two separate tools. 
     
     
         37 . The system of  claim 31 , wherein at least one of said plurality of ports is adapted to receive a front opening unified pod (FOUP) and at least one other of said plurality of ports is adapted to receive a wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod. 
     
     
         38 . The system of  claim 35 , wherein at least one of said plurality of ports is adapted to receive a front opening unified pod (FOUP) and at least one other of said plurality of ports is adapted to receive a wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod. 
     
     
         39 . The system of  claim 36 , wherein at least one of said plurality of ports is adapted to receive a front opening unified pod (FOUP) and at least one other of said plurality of ports is adapted to receive a wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod. 
     
     
         40 . The system of  claim 31 , wherein said at least one transport vehicle is further adapted to rotate a wafer pod when accessing said at least some of said plurality of load ports, such that said wafer pod may be aligned at any angle relative to a reference surface of the accessed tools. 
     
     
         41 . A material handling system, comprising:
 an overhead rack defining a plurality of storage positions, said overhead rack having an outer perimeter;   a plurality of interior windows defined in said overhead rack within an interior region of said overhead rack inside of said outer perimeter of said overhead rack;   a plurality of load ports that are adapted to receive a wafer carrier, wherein each of said plurality of load ports is positioned below one of said plurality of interior windows, and wherein said plurality of load ports are arranged in a non-linear relationship and wherein at least one of said plurality of ports is adapted to receive a wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod; and   at least one transport vehicle that is adapted to access at least some of said plurality of load ports and adapted to rotate a wafer pod when accessing said at least some of said plurality of load ports, such that said wafer pod may be aligned at any angle relative to a reference surface of the accessed tools.   
     
     
         42 . The system of  claim 41 , further comprising at least one periphery window defined in said overhead rack adjacent an outer edge of said outer perimeter of said overhead rack. 
     
     
         43 . The system of  claim 42 , wherein said at least one transport vehicle is further adapted to access one of said plurality of ports that is positioned below said at least one periphery window. 
     
     
         44 . The system of  claim 41 , wherein said at least one transport vehicle is adapted to access each of said plurality of load ports. 
     
     
         45 . The system of  claim 41 , wherein said plurality of load ports are positioned on a single tool. 
     
     
         46 . The system of  claim 41 , wherein said plurality of load ports are positioned on at least two separate tools. 
     
     
         47 . The system of  claim 41 , wherein at least one of said plurality of load ports is adapted to receive a front opening unified pod (FOUP). 
     
     
         48 . The system of  claim 45 , wherein at least one of said plurality of load ports is adapted to receive a front opening unified pod (FOUP) and at least one other of said plurality of load ports is adapted to receive said wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod. 
     
     
         49 . The system of  claim 46 , wherein at least one of said plurality of load ports is adapted to receive a front opening unified pod (FOUP) and at least one other of said plurality of load ports is adapted to receive said wafer pod that does not open to external atmosphere for loading or unloading wafers to or from said wafer pod.