Glass film laminate

Abstract

A glass film laminate includes a glass film and a supporting glass. The glass film and the supporting glass have surfaces in contact with each other, and each of the surfaces has a surface roughness Ra of 2.0 nm or less.

1 - 11 . (canceled) 
     
     
         12 . A method of producing a glass film comprising the steps of:
 laminating a glass film and a supporting glass to prepare a glass film laminate, a surface of the glass film and a surface of the supporting glass, which are in contact with each other, having a surface roughness Ra of 2.0 nm or less respectively, the glass film having a thickness of 5 to 200 μm;   performing a treatments associated with electronic device production on the glass film of the glass film laminate; and then   separating the glass film and the supporting glass from each other.   
     
     
         13 . The method of producing a glass film according to  claim 12 , wherein the step of separating is performed by immersing the glass film laminate in water. 
     
     
         14 . The method of producing a glass film according to  claim 13 , wherein the step of separating is performed while applying an ultrasonic wave to the glass film laminate. 
     
     
         15 . The method of producing a glass film according to  claim 12 , wherein the supporting glass has a thickness of 400 μm or more. 
     
     
         16 . The method of producing a glass film according to  claim 12 , wherein each of the glass film and the supporting glass is formed by an over down-draw method.