Monomer vaporizing device and method of controlling the same

Abstract

A monomer vaporizing device and a method of controlling the same are disclosed. The monomer vaporizing device includes: a first vaporizer and a second vaporizer that receive a purge gas and vaporize a first monomer and a second monomer, respectively; a first flow pipe and a second flow pipe that are connected to the respective vaporizers and allow the first monomer and the second monomer, vaporized by the respective vaporizers, to flow therethrough; a transition tube that is connected to the first flow pipe and the second flow pipe and supplies at least one of the first monomer and the second monomer to a deposition chamber; and a control valve apparatus that regulates monomer flow into the deposition chamber. The device facilitates smooth and uninterrupted application of monomer to the interior of a deposition chamber.

What is claimed is: 
     
         1 . A monomer vaporizing device comprising:
 a first vaporizer that receives a purge gas and vaporizes a first monomer;   a second vaporizer that is disposed parallel to the first vaporizer, receives the purge gas, and vaporizes a second monomer;   a first flow pipe that is connected to the first vaporizer and allows the first monomer vaporized by the first vaporizer to flow therethrough;   a second flow pipe that is connected to the second vaporizer and allows the second monomer vaporized by the second vaporizer to flow therethrough;   a transition tube that is connected to the first flow pipe and the second flow pipe and supplies at least one of the first monomer and the second monomer to a deposition chamber; and   a control valve that is provided on at least one of the first flow pipe and the second flow pipe and adjusts an opening degree of at least one of the first flow pipe and the second flow pipe.   
     
     
         2 . The monomer vaporizing device of  claim 1 , the control valve comprising a three way valve that is provided at a position where the first flow pipe, the second flow pipe, and the transition tube meet. 
     
     
         3 . The monomer vaporizing device of  claim 1 , the control valve comprising:
 a first control valve that is provided on the first flow pipe and adjusts an opening degree of the first flow pipe; and   a second control device that is provided on the second flow pipe and adjusts an opening degree of the second flow pipe.   
     
     
         4 . The monomer vaporizing device of  claim 1 , further comprising:
 a first sensor unit that is provided on the first vaporizer and measures at least one of a pressure and a temperature of the first vaporizer; and   a second sensor unit that is provided on the second vaporizer and measures at least one of a pressure and a temperature of the second vaporizer.   
     
     
         5 . The monomer vaporizing device of  claim 4 , further comprising a control unit that controls an opening degree of the control valve based on at least one of the pressure and the temperature measured by each of the first sensor unit and the second sensor unit. 
     
     
         6 . The monomer vaporizing device of  claim 5 , the control unit directing the control valve to close the first flow pipe and open the second flow pipe when it is determined that the pressure of the first vaporizer as measured by the first sensor unit exceeds a preset first set pressure range. 
     
     
         7 . The monomer vaporizing device of  claim 6 , the control unit directing the control valve to close the second flow pipe when it is determined that the pressure of the second vaporizer as measured by the second sensor unit exceeds a second set pressure range which is preset. 
     
     
         8 . The monomer vaporizing device of  claim 5 , the control unit directing the control valve to close the first flow pipe and open the second flow pipe if the pressure of the first vaporizer does not remain within a first set pressure range within a first set time. 
     
     
         9 . The monomer vaporizing device of  claim 8 , the control unit directing the control valve to close the second flow pipe if the pressure of the second vaporizer does not remain within a second set pressure range for a second set time. 
     
     
         10 . The monomer vaporizing device of  claim 5 , the control unit directing the control valve to close the first flow pipe and open the second flow pipe when it is determined that the temperature of the first vaporizer as measured by the first sensor unit exceeds a first set temperature range which is preset. 
     
     
         11 . The monomer vaporizing device of  claim 10 , the control unit directing the control valve to close the second flow pipe when it is determined that the temperature of the second vaporizer as measured by the second sensor unit exceeds a second set temperature range which is preset. 
     
     
         12 . The monomer vaporizing device of  claim 5 , the control unit directing the control valve to close the first flow pipe and open the second flow pipe if the temperature of the first vaporizer does not remain within a first set temperature range within a third set time. 
     
     
         13 . The monomer vaporizing device of  claim 12 , the control unit directing the control valve to close the second flow pipe if the temperature of the second vaporizer does not remain within a second set temperature range within a fourth set time. 
     
     
         14 . The monomer vaporizing device of  claim 4 , further comprising an alarm unit that alarms an external user when at least one of the pressure and the temperature measured by each of the first sensor unit and the second sensor unit does not correspond to at least one of a set pressure range and a set temperature range which are preset. 
     
     
         15 . The monomer vaporizing device of  claim 1 , further comprising a monomer supply unit that supplies at least one of the first monomer and the second monomer to at least one of the first vaporizer and the second vaporizer. 
     
     
         16 . The monomer vaporizing device of  claim 15 , the monomer supply unit comprising:
 a monomer storage unit that stores at least one of the first monomer and the second monomer; and   a monomer supply pipe that connects the monomer storage unit to at least one of the first vaporizer and the second vaporizer, and allows at least one of the first monomer and the second monomer to flow therethrough.   
     
     
         17 . A method of controlling a monomer vaporizing device, the method comprising:
 supplying a monomer to at least one of a first vaporizer and a second vaporizer;   vaporizing the monomer by heating at least one of the first vaporizer and the second vaporizer;   measuring at least one of a temperature and a pressure of the first vaporizer while first supplying the monomer vaporized by the first vaporizer to a deposition chamber; and   blocking the exit of the monomer from the first vaporizer based on at least one of the measured temperature and the measured pressure of the first vaporizer, and, if the exit of the monomer from the first vaporizer is blocked, supplying the monomer vaporized by the second vaporizer to the deposition chamber.   
     
     
         18 . The method of  claim 17 , the blocking of the exit of the monomer from the first vaporizer comprising blocking the exit of the monomer from the first vaporizer when the pressure of the first vaporizer exceeds a first set pressure range which is preset. 
     
     
         19 . The method of  claim 17 , the supplying of the monomer vaporized by the second vaporizer to the deposition chamber comprising supplying the monomer vaporized by the second vaporizer to the deposition chamber when the pressure of the second vaporizer corresponds to a second set pressure range which is preset. 
     
     
         20 . The method of  claim 17 , the blocking of the exit of the monomer from the first vaporizer comprising blocking the exit of the monomer from the first vaporizer when the pressure of the first vaporizer does not remain within a first set pressure range for a first set time. 
     
     
         21 . The method of  claim 20 , the exit of the monomer from the second vaporizer to the deposition chamber being blocked when the pressure of the second vaporizer does not remain within a second set pressure range for a second set time. 
     
     
         22 . The method of  claim 17 , the blocking of the exit of the monomer from the first vaporizer comprising blocking the exit of the monomer from the first vaporizer when the temperature of the first vaporizer does not remain within a first set temperature range for a third set time. 
     
     
         23 . The method of  claim 17 , the exit of the monomer from the second vaporizer to the deposition chamber being blocked when the temperature of the second vaporizer does not remain within a second set temperature range for a fourth set time. 
     
     
         24 . The method of  claim 17 , the blocking of the exit of the monomer from the first vaporizer comprising blocking the exit of the monomer from the first vaporizer when the temperature of the first vaporizer exceeds a first set temperature range which is preset. 
     
     
         25 . The method of  claim 17 , the exit of the monomer from the second vaporizer to the deposition chamber being blocked when the temperature of the second vaporizer exceeds a second set temperature range which is preset.