Method and device for finishing a workpiece surface

Abstract

A method for finish-machining a workpiece surface includes moving the workpiece surface relative to an active area of the finishing tool in a rotation direction about a workpiece axis, and superimposing on the relative movement of the workpiece surface and the active area an additional oscillatory movement with an oscillation frequency lower than 20 kHz in a direction perpendicular to the workpiece surface.

What is claimed is: 
     
         1 . A method for finish-machining a workpiece surface with a finishing tool, comprising:
 moving the workpiece surface relative to an active area of the finishing tool in a rotation direction about a workpiece axis, and   superimposing on the relative movement of the workpiece surface and the active area an additional oscillatory movement with an oscillation frequency lower than 20 kHz in a direction perpendicular to the workpiece surface.   
     
     
         2 . The method of  claim 1 , wherein the oscillation frequency of the additional movement is lower than 16 kHz. 
     
     
         3 . The method of  claim 1 , wherein the oscillation frequency of the additional movement is lower than 1 kHz. 
     
     
         4 . The method of  claim 1 , wherein the oscillation frequency of the additional movement is greater than 50 Hz. 
     
     
         5 . The method of  claim 1 , wherein the oscillation frequency of the additional movement is greater than 100 Hz. 
     
     
         6 . The method of  claim 1 , wherein an amplitude of the additional movement is at least about 5 micrometer and at most about 200 micrometer. 
     
     
         7 . The method of  claim 1 , wherein the workpiece surface and the active area are not moved relative to each other in a direction parallel to the workpiece axis. 
     
     
         8 . The method of  claim 1 , wherein the workpiece surface and the active area are moved back and forth in a direction parallel to the workpiece axis. 
     
     
         9 . The method of  claim 8 , wherein the oscillation frequency of the back-and-forth movement in the direction parallel to the workpiece axis is at least about 1 Hz. 
     
     
         10 . The method of  claim 8 , wherein the oscillation frequency of the back-and-forth movement in the direction parallel to the workpiece axis is at most about 50 Hz. 
     
     
         11 . The method of  claim 8 , wherein the oscillation frequency of the additional oscillatory movement is greater by a factor of 1 to 1000 than an oscillation frequency of the back-and-forth movement in the direction parallel to the workpiece axis. 
     
     
         12 . The method of  claim 8 , wherein the oscillation frequency of the additional oscillatory movement is greater by a factor of 6 to 40 than an oscillation frequency of the back-and-forth movement in the direction parallel to the workpiece axis. 
     
     
         13 . The method of  claim 8 , wherein an amplitude of the back-and-forth movement in the direction parallel to the workpiece axis is between about 0.1 mm and about 3 mm. 
     
     
         14 . The method of  claim 8 , wherein an amplitude of the additional movement is smaller by a factor of 5 to 600 than an amplitude the back-and-forth movement in the direction parallel to the workpiece axis. 
     
     
         15 . The method of  claim 8 , wherein an amplitude of the additional movement is smaller by a factor of 10 to 20 than an amplitude the back-and-forth movement in the direction parallel to the workpiece axis. 
     
     
         16 . A device for finish-machining a workpiece surface, comprising:
 a finishing tool comprising an active area,   a rotary drive for generating a rotary movement of the workpiece surface relative to the active area of the finishing tool in a rotation direction about a workpiece axis, and   an additional drive constructed to generate an additional oscillatory movement with an oscillation frequency lower than 20 kHz in a direction perpendicular to the workpiece surface, wherein the additional oscillatory movement is superimposed on the relative movement of the workpiece surface and the active area.   
     
     
         17 . The device of  claim 16 , wherein the additional drive comprises a piezoelectric actuator. 
     
     
         18 . The device of  claim 17 , wherein the piezoelectric actuator is aligned along an additional movement axis and comprises piezoelectric elements which are stacked along the additional movement axis. 
     
     
         19 . The device of  claim 16 , wherein the finishing tool is constructed as a finishing stone. 
     
     
         20 . The device of  claim 16 , wherein the finishing tool is constructed as a finishing belt, the dice further comprising a pressing shell for pressing the finishing belt against the workpiece surface, wherein the pressing shell has a pressing surface operating transversely to a running direction of the finishing belt, wherein at least a portion of the pressing surface is formed by a pressing section that is movable relative to a stationary shell section along an additional movement axis. 
     
     
         21 . The device of  claim 20 , wherein the pressing section and the stationary shell section are integrally formed with each other and interconnected via a connecting portion, wherein the connecting portion is constructed such that driving forces of the additional drive cause the pressing section to move along the additional movement axis.