Preparation method of Ruthenium(Ru) powder for preparation of Ruthenium target

Abstract

The present invention is related to a manufacturing method of high purity and refined Ru (Ruthenium) powder produced by using a waste Ru target. Yield of the target and physical properties of a thin film are improved by producing tremendously refined in which oxygen content of the target is decreased, and a crystal particle size is reduced. In order to obtain these merits, powder having a hollow inside is produced by applying plasma to a waste Ru target. Carbon impurities are selectively removed through a atmospheric heat process and Ru powder is oxidized. Thereby, Ru oxide (RuOx) powder is produced. High purity and refined Ru powder is acquired through a hydrogen atmospheric heat process after pulverizing the produced Ru oxide (RuOx) powder into refined shape.

1 . A manufacturing method of Ru (Ruthenium) powder comprising,
 (a) a step for removing pollutants remaining on a surface of a waste Ru target and washing the surface;   (b) a step for forming a plasma atmosphere by decompressing an inside of a plasma device, injecting a reaction gas, and applying electricity after introducing the washed waste Ru target into the plasma device;   (c) a step for producing Ru powder by increasing a plasma electricity and then, forcibly dispersing ingots;   (d) a step for selectively removing carbon by applying an atmospheric heat process to the produced Ru powder in order to produce Ru oxide (RuOx) powder;   (e) a step for pulverizing the produced Ru oxide (RuOx) powder into refined shape for producing refined Ru powder; and   (f) a step for producing high purity Ru powder by applying a hydrogen atmospheric heat process to the produced Ru oxide (RuOx) powder.   
     
     
         2 . The manufacturing method of Ru powder according to the  claim 1 , wherein an inside pressure of the device is 100-300 torr in the step for forming plasma, and any one selected from Ar, H 2 , N 2 , or O 2  or a mixed gas thereof is used as a plasma gas for producing Ru powder having a hollow inside. 
     
     
         3 . The manufacturing method of Ru powder according to the  claim 1 , wherein the atmospheric heat process is performed at 800-1200° C. for 1-5 hours. 
     
     
         4 . The manufacturing method of Ru powder according to the  claim 1 , wherein the step for pulverizing powder is performed by any one selected from Ball Mill, Planetary Mill or Jet Mill. 
     
     
         5 . The manufacturing method of Ru powder according to the  claim 1 , wherein the hydrogen atmospheric heat process is performed under 800-1200° C. for 1-5 hours.