High aspect ratio sample holder

Abstract

An elongated member is formed which has a frontal and a distal end, and a length axis. The frontal end satisfies vacuum sealing and maneuverability specifications of a sample holder for a particle beam microscope. The elongated member includes a tubular section defining an axial cavity along the length axis, and having an orifice toward the distal end of the elongated member. The resulting device is characterized as being a sample holder for use in particle beam microscopes. The sample holder enables the examination of high aspect ratio samples by accommodating them in its axial cavity. The examination can take place without prior modification of the high aspect ratio samples.

1 . A method, comprising:
 forming an elongated member having a frontal and a distal end and a length axis, wherein said frontal end satisfies vacuum sealing and maneuverability specifications of a sample holder for a particle beam microscope (PBM), and wherein said elongated member comprises a tubular section defining an axial cavity therewithin, directed along said length axis and having an orifice toward said distal end; and   wherein said method is characterized as building a sample holder that enables examination of high aspect ratio samples in said PBM without having to modify said high aspect ratio samples for said examination.   
     
     
         2 . The method of  claim 1 , wherein said method further comprises:
 forming said distal end of said elongated member in such manner to connect with fixtures of said PBM for damping vibrations of said elongated member.   
     
     
         3 . The method of  claim 1 , wherein said method further comprises:
 coupling to said elongated member a bracing member which is capable of securing substantially in parallel with said length axis a high aspect ratio sample that has a tip, and positioning said bracing member in such manner that said tip can be exposed to the particle beam of said PBM when inserting said elongated member is into said PBM and said high aspect ratio sample is being secured by said bracing member.   
     
     
         4 . The method of  claim 3 , wherein said method further comprises:
 forming said bracing member from a resiliently deformable structure having a slot, and sizing said slot to be able to resistantly accept, and thereby secure, said high aspect ratio sample.   
     
     
         5 . The method of  claim 4 , wherein said method further comprises:
 tightly fitting said bracing member is into said axial cavity and directing said slot along said length axis.   
     
     
         6 . The method of  claim 4 , wherein said method further comprises:
 forming said resiliently deformable structure of material having a vapor pressure less than about 10 −6  torr.   
     
     
         7 . The method of  claim 3 , wherein said method further comprises:
 making said bracing member in the form of a screw and/or a clamp.   
     
     
         8 . The method of  claim 1 , wherein said method further comprises:
 fabricating said tubular section out of a metal.   
     
     
         9 . The method of  claim 1 , wherein said PBM is a Transmission Electron Microscope (TEM).