X-ray Detector for Electron Microscope

Abstract

Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.

We claim as follows: 
     
         1 . An x-ray detector assembly for an electron microscope, comprising:
 a mount configured for being supported within the lens of a transmission electron microscope;   at least two x-ray detectors supported by the mount, the x-ray detectors arranged to receive x-rays from at least three different directions from a sample, each detector including;
 a cold shield at least partly surrounding the detector; and 
 a heat source to maintain the detector at a higher temperature than the cold shield. 
   
     
     
         2 - 35 . (canceled)