US2014070107A1PendingUtilityA1
Ultra-sensitive radiation dosimeters
Est. expirySep 11, 2032(~6.1 yrs left)· nominal 20-yr term from priority
H10D 62/8325H10F 71/121H10F 30/298H10K 30/00H10K 85/221G01T 1/026Y02E10/549
47
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Claims
Abstract
An apparatus comprises a conducting substrate layer, a dielectric layer formed over the conducting substrate layer, a channel formed over at least a portion of the dielectric layer and first and second source/drain regions formed on respective first and second portions of the channel. The channel comprises a thin-film carbon material. The conducting substrate layer, the dielectric layer, the channel and the first and second source/drain regions are configured such that exposure to radiation causes a change in a threshold voltage of the apparatus.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . An apparatus, comprising:
a conducting substrate layer; a dielectric layer formed over the conducting substrate layer; a channel formed over at least a portion of the dielectric layer; and first and second source/drain regions formed on respective first and second portions of the channel; wherein the channel comprises a thin-film carbon material; and wherein the conducting substrate layer, the dielectric layer, the channel and the first and second source/drain regions are configured such that exposure to radiation causes a change in a threshold voltage of the apparatus.
2 . The apparatus of claim 1 , wherein the thin-film carbon material is graphene.
3 . The apparatus of claim 1 , wherein the thin-film carbon material is a carbon nanotube array.
4 . The apparatus of claim 1 , wherein the conducting substrate layer is one of a heavily-doped silicon substrate material, a flexible polymer material, a thin-film transistor substrate and a silicon carbide substrate material.
5 . The apparatus of claim 1 , wherein the dielectric layer is one of a silicon dioxide insulator and a silicon nitride insulator.
6 . The apparatus of claim 1 , wherein the dielectric material can be annealed to release trapped charges.
7 . The apparatus of claim 1 , wherein the channel material provides high dosimetric sensitivity compared to a fully-depleted silicon-on insulator (FDSOI) metal oxide semiconductor field effect transistor (MOSFET).
8 . The apparatus of claim 1 , wherein a thickness of the dielectric layer is determined as a function of a desired dosimetric sensitivity.
9 . The apparatus of claim 1 , wherein the thickness of the dielectric layer is about 300 nm.
10 . The apparatus of claim 1 , wherein the threshold voltage of the apparatus increases linearly as the exposure to radiation increases.
11 . A radiation dosimeter, comprising:
at least one transistor comprising a conducting substrate, a dielectric layer formed on the conducting substrate, a thin-film carbon channel formed on the dielectric layer, and first and second source/drain regions formed on respective first and second portions of the thin-film carbon channel; a display coupled to the at least one transistor; and processing circuitry; wherein the at least one transistor is configured such that exposure to radiation causes a change in a threshold voltage of the at least one transistor, a radiation level is a function of a difference between the threshold voltage of the transistor after exposure to radiation and a threshold voltage of the transistor before exposure to radiation, and the processing circuitry is operative to calculate the radiation level and output the radiation level on the display.
12 . The radiation dosimeter of claim 11 , wherein the thin-film carbon channel is a graphene layer.
13 . The radiation dosimeter of claim 11 , wherein the thin-film carbon channel is a carbon nanotube array.
14 . The radiation dosimeter of claim 11 , further comprising an annealing component operative to expose at least the dielectric layer of the transistor to a given temperature.
15 . The radiation dosimeter of claim 11 , wherein the conducting substrate layer is one of a heavily-doped silicon substrate material, a flexible polymer material, a thin-film transistor substrate and a silicon carbide substrate material.
16 . The radiation dosimeter of claim 11 , wherein the dielectric layer is one of a silicon dioxide insulator and a silicon nitride insulator.
17 . The radiation dosimeter of claim 11 , further comprising an alarm component operative to output an alarm if the radiation level is above a specified threshold level.
18 . The radiation dosimeter of claim 11 , wherein the threshold voltage of the transistor increases linearly as the exposure to radiation increases.
19 . A radiation detection system, comprising:
at least one transistor comprising a conducting substrate, a dielectric layer formed on the conducting substrate, a thin-film carbon channel formed on the dielectric layer, and first and second source/drain regions formed on respective first and second portions of the thin-film carbon channel, the at least one transistor being configured such that exposure to radiation causes a change in a threshold voltage of the at least one transistor; a memory; and a processor device operatively coupled to the memory and configured to: calculate a radiation level, the radiation level being a function of a difference between the threshold voltage of the transistor after exposure to radiation and a threshold voltage of the transistor before exposure to radiation; and output the radiation level to a display.
20 . The system of claim 19 , wherein the thin-film carbon channel is a graphene layer.
21 . The system of claim 19 , wherein the thin-film carbon channel is a carbon nanotube array.
22 . The system of claim 19 , wherein the threshold voltage of the at least one transistor increases linearly as the exposure to radiation increases.Join the waitlist — get patent alerts
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