Pattern forming device and pattern forming method

Abstract

A pattern forming device includes a plurality of tanks, and a power supply device. Each of the tanks has an open end having the same shape as a profile shape of a corresponding one of regions of a surface of a workpiece, in which different types of films are to be formed, and stores a corresponding one of electrodeposition solutions used to form the different types of films in a state where the open end is in contact with the surface. The power supply device applies a predetermined voltage to between the workpiece that serves as a first electrode, and each one of second electrodes in the tanks.

What is claimed is: 
     
         1 . A pattern forming device that forms, by electrodeposition, different types of films in corresponding multiple regions of a surface of a workpiece to obtain a predetermined film pattern from the films, the pattern forming device comprising:
 a plurality of tanks each of which has an open end having the same shape as a profile shape of a corresponding one of the regions in which the different types of films are to be formed, and each of which stores a corresponding one of electrodeposition solutions used to form the different types of films in a state where the open end is in contact with the surface; and   a power supply device that applies a predetermined voltage to between the workpiece that serves as a first electrode, and each one of second electrodes in the tanks.   
     
     
         2 . The pattern forming device according to  claim 1 , wherein the power supply device applies the voltage to between the first electrode and the second electrodes in the tanks at the same time. 
     
     
         3 . The pattern forming device according to  claim 1 , further comprising:
 sealing portions that prevent leakage of the electrodeposition solutions in the tanks from between the surface of the workpiece and the open ends of the tanks in the state where the open ends are in contact with the surface of the workpiece.   
     
     
         4 . The pattern forming device according to  claim 2 , further comprising:
 sealing portions that prevent leakage of the electrodeposition solutions in the tanks from between the surface of the workpiece and the open ends of the tanks in the state where the open ends are in contact with the surface of the workpiece.   
     
     
         5 . The pattern forming device according to  claim 1 , wherein inner wall surfaces of the tanks at least partially serve as the second electrodes. 
     
     
         6 . The pattern forming device according to  claim 2 , wherein inner wall surfaces of the tanks at least partially serve as the second electrodes. 
     
     
         7 . The pattern forming device according to  claim 3 , wherein inner wall surfaces of the tanks at least partially serve as the second electrodes. 
     
     
         8 . The pattern forming device according to  claim 4 , wherein inner wall surfaces of the tanks at least partially serve as the second electrodes. 
     
     
         9 . A pattern forming method for forming, by electrodeposition, different types of films in corresponding multiple regions of a surface of a workpiece to obtain a predetermined film pattern from the films, the method characterized by comprising:
 bringing each of a plurality of tanks having an open end having the same shape as a profile shape of a corresponding one of the regions of the surface of the workpiece, in which the different types of films are to be formed, into contact with a corresponding one of the regions;   storing electrodeposition solutions used to form the different types of films in the corresponding tanks; and   applying a voltage to between the workpiece that serves as a first electrode, and each one of second electrodes in the tanks.