Ceramic sintered body and method of manufacturing ceramic sintered body

Abstract

A ceramic sintered body according to the present invention comprises: silicon carbide and aluminum nitride, wherein a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride is greater than 10% and 97% or smaller, and a bulk density is greater than 3.18 g/cm 3 .

1 . A ceramic sintered body comprising:
 silicon carbide and aluminum nitride, wherein   a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride is greater than 10% and 97% or smaller, and   a bulk density is greater than 3.18 g/cm 3 .   
     
     
         2 . The ceramic sintered body according to  claim 1 , wherein
 a thermal conductivity is 65 W/mK or smaller.   
     
     
         3 . The ceramic sintered body according to  claim 2 , wherein
 a thermal conductivity is 40 W/mK or smaller.   
     
     
         4 . The ceramic sintered body according to  claim 1 , wherein
 a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride is 11% or greater and 90% or smaller.   
     
     
         5 . The ceramic sintered body according to  claim 1 , wherein
 a bulk density is 3.23 g/cm 3  or greater.   
     
     
         6 . The ceramic sintered body according to  claim 1 , wherein
 a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride is 52% or greater and 97% or smaller.   
     
     
         7 . The ceramic sintered body according to  claim 1 , wherein
 a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride is greater than 10% and 76% or smaller.   
     
     
         8 . The ceramic sintered body according to  claim 1 , wherein
 a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride is 27% or greater and 97% or smaller.   
     
     
         9 . The ceramic sintered body according to  claim 1 , which contains yttrium oxide. 
     
     
         10 . A method of manufacturing a ceramic sintered body containing silicon carbide and aluminum nitride, comprising:
 a step of mixing a silicon-containing raw material containing a liquid silicon compound and a carbon-containing raw material containing an organic compound which produces carbon by heating, to produce a silicon carbide precursor;   a step of heating and calcining the silicon carbide precursor under inert atmosphere to produce a silicon carbide raw material;   a step of mixing an aluminum-containing raw material containing a hydrolyzable aluminum compound, a carbon-containing raw material containing an organic compound which produces carbon by heating, and water, to produce an aluminum nitride precursor;   a step of heating and calcining the aluminum nitride precursor under nitrogen atmosphere to produce an aluminum nitride raw material;   a step of mixing the silicon carbide raw material and the aluminum nitride raw material; and   a step of sintering mixture of the silicon carbide raw material and the aluminum nitride raw material, wherein   a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride contained in the mixture of the silicon carbide raw material and the aluminum nitride raw material is greater than 10% and 97% or smaller.   
     
     
         11 . The method of manufacturing a ceramic sintered body according to  claim 10 , wherein
 a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride contained in the mixture of the silicon carbide raw material and the aluminum nitride raw material is greater than 10% and 51% or smaller.   
     
     
         12 . A ceramic sintered body containing silicon carbide and aluminum nitride manufactured by a method of manufacturing the ceramic sintered body comprising:
 a step of mixing a silicon-containing raw material containing a liquid silicon compound and a carbon-containing raw material containing an organic compound which produces carbon by heating, to produce a silicon carbide precursor;   a step of heating and calcining the silicon carbide precursor under inert atmosphere to produce a silicon carbide raw material;   a step of mixing an aluminum-containing raw material containing a hydrolyzable aluminum compound, a carbon-containing raw material containing an organic compound which produces carbon by heating, and water, to produce an aluminum nitride precursor;   a step of heating and calcining the aluminum nitride precursor under nitrogen atmosphere to produce an aluminum nitride raw material;   a step of mixing the silicon carbide raw material and the aluminum nitride raw material; and   a step of sintering mixture of the silicon carbide raw material and the aluminum nitride raw material, wherein   a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride contained in the mixture of the silicon carbide raw material and the aluminum nitride raw material is greater than 10% and 97% or smaller.   
     
     
         13 . The ceramic sintered body according to  claim 12 , wherein
 a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride contained in the mixture of the silicon carbide raw material and the aluminum nitride raw material is greater than 10% and 51% or smaller.   
     
     
         14 . The ceramic sintered body according to  claim 12 , wherein
 a bending strength is 900 MPa or greater.   
     
     
         15 . A method of manufacturing a ceramic sintered body containing silicon carbide and aluminum nitride, comprising:
 a step of mixing a silicon-containing raw material containing a liquid silicon compound, a carbon-containing raw material containing an organic compound which produces carbon by heating, an aluminum-containing raw material containing a hydrolyzable aluminum compound, and water, to produce a composite precursor;   a step of heating and calcining the composite precursor under inert atmosphere containing nitrogen, to produce composite powder containing silicon carbide and aluminum nitride; and   a step of sintering the composite powder, wherein   a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride contained in the composite powder is greater than 10% and 97% or smaller.   
     
     
         16 . The method of producing a ceramic sintered body according to  claim 15 , wherein
 a weight ratio of the aluminum nitride to the sum of the silicon carbide and the aluminum nitride contained in the composite powder is higher than 11% and 90% or lower.   
     
     
         17 . The method of producing a ceramic sintered body according to  claim 15 ,
 a step of mixing the composite powder, a phenol resin, and yttrium oxide.   
     
     
         18 . A ceramic sintered body containing silicon carbide and aluminum nitride, manufactured by a production method comprising:
 a step of mixing a silicon-containing raw material containing a liquid silicon compound, a carbon-containing raw material containing an organic compound which produces carbon by heating, an aluminum-containing raw material containing a hydrolyzable aluminum compound, and water, to produce a composite precursor;   a step of heating and calcining the composite precursor under inert atmosphere containing nitrogen, to produce composite powder containing silicon carbide and aluminum nitride; and   a step of sintering the composite powder, wherein   a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride contained in the composite powder is greater than 10% and 97% or smaller.   
     
     
         19 . The ceramic sintered body according to  claim 18 , wherein
 a weight ratio of the aluminum nitride relative to a total weight ratio of the silicon carbide and the aluminum nitride contained in the composite powder is greater than 11% and 90% or smaller.   
     
     
         20 . The ceramic sintered body according to  claim 18 , produced by the method further comprising:
 a step of mixing the composite powder, a phenol resin, and yttrium oxide.   
     
     
         21 . The ceramic sintered body according to  claim 18 , wherein
 the ceramic sintered body has a thermal conductivity of 30 W/mK or smaller and is used as a heat insulating material.