Wafer pod gas charging apparatus

Abstract

A wafer pod gas charging apparatus includes a machine, on which different types of nozzles are introduced. One type of the nozzles is designed to have an inner tube elastically movable in an outer sleeve. When a wafer pod having gas ports of a specific depth is placed on the machine for charging gas, the exact type of the wafer pod can be detected by a sensor unit on the machine and the gas ports of the wafer pod can properly engage with one matching type of the nozzles on the machine to enable the gas charging. Therefore, by changing the structural designs of the nozzles on the machine, the same one machine is adapted to charge gas into different types of wafer pods at reduced cost.

What is claimed is: 
     
         1 . A wafer pod gas charging apparatus for using with a wafer pod, the wafer pod including a bottom, on which a specific zone, at least two gas ports and at least three locating holes are provided; the wafer pod gas charging apparatus comprising:
 a machine having an operating plate for carrying the wafer pod thereon and correspondingly contacting with the bottom of the wafer pod;   a sensor unit being mounted on the operating plate of the machine at a position corresponding to the specific zone on the bottom of the wafer pod;   at least two first nozzles being mounted on the operating plate of the machine at predetermined positions;   at least two second nozzles being mounted on the operating plate of the machine at other predetermined positions; each of the second nozzles including an inner tube, an outer sleeve, and an elastic element; the elastic element being fitted in the outer sleeve, and the inner tube being received in the outer sleeve to press against the elastic element, such that the inner tube is axially movable in the outer sleeve due to the elasticity of the elastic element;   at least three locating modules being mounted on the operating plate of the machine; each of the locating modules including a locating pin, and the locating pins of the locating modules being correspondingly inserted into the locating holes on the bottom of the wafer pod;   a gas charger being arranged on the machine for containing a type of gas therein; the gas charger communicating with the at least two first nozzles and the at least two second nozzles and including a control unit; and   a controller being arranged on the machine to electrically connect to the control unit of the gas charger and the sensor unit;   wherein either the at least two first nozzles or the at least two second nozzles are correspondingly connected to the at least two gas ports on the wafer pod.   
     
     
         2 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein the sensor unit is a light sensor electrically connected to the controller. 
     
     
         3 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein the sensor unit is a pushbutton-type optical sensor electrically connected to the controller. 
     
     
         4 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein the specific zone is formed with a recess. 
     
     
         5 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein the gas contained in the gas charger is nitrogen. 
     
     
         6 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein the control unit of the gas charger includes a gas pressure sensor. 
     
     
         7 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein the elastic element in each of the second nozzles is a spring. 
     
     
         8 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein each of the first nozzles includes a rubber ring member. 
     
     
         9 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein each of the second nozzles includes a rubber ring member. 
     
     
         10 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein each of the locating modules includes a pushbutton-type optical sensor correspondingly pressed against the bottom of the wafer pod. 
     
     
         11 . The wafer pod gas charging apparatus as claimed in  claim 1 , wherein the inner tube of each of the second nozzles has a nut screwed thereto.