Vacuum device

Abstract

A vacuum device is provided which forms an autarkic subassembly and includes a vacuum container, a vacuum pump connected to the vacuum container, a vacuum connection for connecting to an external installation, and a control device designed for control of the vacuum pump. The vacuum device serves as a suction device to produce a vacuum in and to suck or draw off gas from this connected installation. The vacuum device is designed as an autarkic (self-sufficient or self-contained) subassembly, which can be connected for example to an electron microscope.

I/We claim: 
     
         1 . A vacuum device comprising:
 a vacuum container,   a vacuum pump connected to the vacuum container,   a vacuum connection for connecting the vacuum device to an external installation, and   a control device designed to control the vacuum pump,   
       wherein the vacuum device forms an autarkic subassembly to the external installation. 
     
     
         2 . The vacuum device according to  claim 1 , further comprising at least one valve, and wherein the control device is designed to control the at least one valve. 
     
     
         3 . The vacuum device according to  claim 1 , wherein the external installation is an electron microscope. 
     
     
         4 . The vacuum device according to  claim 3 , wherein the vacuum connection is connectable to the electron microscope such that the vacuum device is arranged downstream of a turbo-pump of the electron microscope. 
     
     
         5 . The vacuum device according to  claim 1 , further comprising at least a first shut-off valve actuatable by the control device and arranged in a flow path between the vacuum container and the vacuum pump. 
     
     
         6 . The vacuum device according to  claim 5 , wherein the vacuum connection is arranged on the flow path. 
     
     
         7 . The vacuum device according to  claim 5 , further comprising a second shut-off valve actuatable by the control device and arranged in the flow path, between the vacuum connection and the vacuum pump. 
     
     
         8 . The vacuum device according to  claim 1 , further comprising a vent opening closable by a valve. 
     
     
         9 . The vacuum device according to  claim 8 , wherein the control device is designed to control the valve of the vent opening. 
     
     
         10 . The vacuum device according to  claim 1 , wherein the control device is a memory-programmable control. 
     
     
         11 . The vacuum device according to  claim 1 , wherein the control device comprises at least one signal input by which a switch signal may be led to the control device, wherein the control device is designed such that on receipt of the switch signal the control device activates the vacuum pump and/or at least one valve to provide a vacuum at the vacuum connection. 
     
     
         12 . The vacuum device according to  claim 11 , wherein the signal input is subjected to mains voltage as a switch signal. 
     
     
         13 . The vacuum device according to  claim 1 , wherein the control device is designed such that operating times for the vacuum pump are preset. 
     
     
         14 . The vacuum device according to  claim 1 , wherein the control device is designed such that by switching the vacuum pump on and off, the vacuum pump maintains the pressure inside the vacuum container below a predefined limit value, and different limit values can be set in a time-dependent manner. 
     
     
         15 . The vacuum device according to  claim 1 , wherein the control device is designed such that it controls the vacuum pump and at least one valve, such that the vacuum container and the vacuum pump can be selectively and/or simultaneously brought into suction connection with the vacuum connection. 
     
     
         16 . The vacuum device according to  claim 1 , wherein the control device comprises at least one sensor connection and is designed such that control of the vacuum pump and/or of at least one valve is effected in dependence on a sensor signal present at the sensor connection 
     
     
         17 . The vacuum device according to  claim 16 , wherein the sensor connection is connected or is connectable to a temperature sensor.