Electrostatic induction generation device and electrostatic induction generation apparatus having a movable electrode formed between a first fixed electrode substrate and a second fixed electrode substrate

Abstract

An electrostatic induction generation device comprising a first fixed electrode substrate having a first electret electrode, a second fixed electrode substrate having a second electret electrode, a movable electrode substrate having a movable electrode, a holding frame formed separately from the movable electrode, a first pair of electrode support beams and a second pair of electrode support beams connected with the movable electrode and the holding frame, and wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate, and the movable electrode is opposed to the first electret electrode and the second electret electrode.

What is claimed is: 
     
         1 . An electrostatic induction generation device comprising:
 a first fixed electrode substrate having a first electret electrode finger and a second electret electrode finger;   a second fixed electrode substrate having a third electret electrode finger and a fourth electret electrode finger; and   a movable electrode substrate having a first electrode finger and a second electrode finger wherein the movable electrode substrate is formed between the first fixed electrode substrate and the second fixed electrode substrate,   the first electrode finger is opposed to the first electret electrode finger and the third electret electrode finger;   the second electrode finger is opposed to the second electret electrode finger and the fourth electret electrode finger, and   the first electrode and the second electrode are formed parallel to each other in a direction perpendicular to a movable direction of the first electrode and the second electrode.   
     
     
         2 . The electrostatic induction generation device according to  claim 1 , wherein
 the movable electrode substrate having a through hole between the first electrode finger and the second electrode finger.   
     
     
         3 . The electrostatic induction generation device according to  claim 1 , wherein
 at least two of the movable electrodes are disposed so that the respective movable directions are perpendicular to each other.   
     
     
         4 . An electrostatic induction generation apparatus comprising:
 the electrostatic induction generation device according to  claim 1 .   
     
     
         5 . An electrostatic induction generation apparatus comprising:
 the electrostatic induction generation device according to  claim 2 .