Plating apparatus

Abstract

Disclosed herein is a plating apparatus, including: a plating tank receiving a plating solution and having an article to be plated injected thereinto; an anode disposed to face one surface or both surfaces of the article to be plated; and a shielding member disposed between the article to be plated and the anode and configured of a first plate and a second plate adjacently disposed to the first plate, the first plate and the second plate moving in parallel with each other.

What is claimed is: 
     
         1 . A plating apparatus, comprising:
 a plating tank receiving a plating solution and having an article to be plated injected thereinto;   an anode disposed to face one surface or both surfaces of the article to be plated; and   a shielding member disposed between the article to be plated and the anode and configured of a first plate and a second plate adjacently disposed to the first plate, the first plate and the second plate moving in parallel with each other.   
     
     
         2 . The plating apparatus as set forth in  claim 1 , wherein the first plate and the second plate of the shielding member are each provided with a shielding pattern including a plurality of through parts and a plurality of blocking parts. 
     
     
         3 . The plating apparatus as set forth in  claim 2 , wherein the shielding pattern formed on the first plate and the shielding pattern formed on the second plate are the same as each other. 
     
     
         4 . The plating apparatus as set forth in  claim 2 , wherein the shielding pattern formed on the first plate and the shielding pattern formed on the second plate are different from each other. 
     
     
         5 . The plating apparatus as set forth in  claim 1 , wherein the first plate and the second plate of the shielding member are each formed of a plurality of regions corresponding to each other; and
 each region forming the first plate and each region forming the second plate are provided with shielding pattern including a plurality of through parts and a plurality of blocking parts.   
     
     
         6 . The plating apparatus as set forth in  claim 5 , wherein each shielding pattern formed in each region of the first plate is the same or different as or from each shielding pattern formed in a region corresponding to the second plate. 
     
     
         7 . The plating apparatus as set forth in  claim 1 , wherein the first plate and the second plate of the shielding member vertically move with respect to a bottom surface of the plating tank. 
     
     
         8 . The plating apparatus as set forth in  claim 1 , wherein the first plate and the second plate of the shielding member slidably move. 
     
     
         9 . A plating apparatus, comprising:
 a plating tank receiving a plating solution and having an article to be plated injected thereinto;   an anode disposed to face one surface or both surfaces of the article to be plated; and   a shielding member disposed between the article to be plated and the anode and configured of a plurality of plates adjacently disposed to each other, the plurality of plates each moving in parallel with respect to the adjacent plates.   
     
     
         10 . The plating apparatus as set forth in  claim 9 , wherein the plurality of plates of the shielding member are each provided with shielding pattern including a plurality of through parts and a plurality of blocking parts. 
     
     
         11 . The plating apparatus as set forth in  claim 10 , wherein each shielding pattern formed on the plurality of plates is the same as each other. 
     
     
         12 . The plating apparatus as set forth in  claim 10 , wherein each shielding pattern formed on the plurality of plates is different from each other. 
     
     
         13 . The plating apparatus as set forth in  claim 9 , wherein each of the plurality of plates of the shielding member is formed of a plurality of regions corresponding to each other and each region of each plate is provided with the shielding pattern including a plurality of through parts and a plurality of blocking parts. 
     
     
         14 . The plating apparatus as set forth in  claim 13 , wherein each shielding pattern formed for each region corresponding to each of the plurality of plates is the same or different as or from each other. 
     
     
         15 . The plating apparatus as set forth in  claim 9 , wherein each of the plurality of plates of the shielding member vertically moves with respect to a bottom surface of the plating tank. 
     
     
         16 . The plating apparatus as set forth in  claim 9 , wherein each of the plurality of plates of the shielding member slidably moves.