Using boron-containing compounds, gasses and fluids during ammonothermal growth of group-iii nitride crystals

Abstract

Boron-containing compounds, gasses and fluids are used during ammonothermal growth of group-III nitride crystals. Boron-containing compounds are used as impurity getters during the ammonothermal growth of group-III nitride crystals. In addition, a boron-containing gas and/or supercritical fluid is used for enhanced solubility of group-III nitride into said fluid.

What is claimed is: 
     
         1 . An apparatus for growing (Al,Ga,In)N crystals, comprising:
 (a) a vessel for containing (Al,Ga,In)N source materials and (Al,Ga,In)N seed crystals;   (b) wherein the vessel is filled with a solvent for dissolving the (Al,Ga,In)N source materials and the dissolved (Al,Ga,In)N source materials are transported to the (Al,Ga,In)N seed crystals for ammonothermal growth of the (Al,Ga,In)N crystals; and   (c) wherein boron-containing material is placed into the vessel's environment for use as impurity getters during the ammonothermal growth of the (Al,Ga,In)N crystals, and the boron-containing material includes one or more of borane (BH 3 ), diborane (B 2 H 6 ), borazane (BNH 6 ), borazine (B 3 N 3 H 6 ), sodium borohydride (NaBH 4 ), and boron in its elemental form.   
     
     
         2 . The apparatus of  claim 1 , wherein the solvent comprises a nitrogen-containing solvent. 
     
     
         3 . The apparatus of  claim 1 , wherein the impurity getters remove one or more impurities that include oxygen, oxygen-containing compounds, water or other materials in the vessel. 
     
     
         4 . The apparatus of  claim 1 , wherein the boron-containing material is used to modify or enhance solubility of the (Al,Ga,In)N source materials or (Al,Ga,In)N seed crystals into the solvent. 
     
     
         5 . The apparatus of  claim 1 , wherein the solvent is entirely or partially in a supercritical state.