Ink-jet head and method of manufacturing the same

Abstract

According to one embodiment, an ink-jet head includes a piezoelectric member which forms an ink pressure chamber, an electrode disposed on a side surface of the piezoelectric member, a nozzle plate attached to the piezoelectric member and including a nozzle hole communicating with the ink pressure chamber, a surface of the nozzle plate including a top surface of the nozzle plate, and a protection film which covers the surface of the nozzle plate, a peripheral portion of an adhesion part between the piezoelectric member and the nozzle plate, and the electrode. A recess is formed in a part of the protection film covering the top surface of the nozzle plate. The part of the protection film corresponds to a peripheral area of the nozzle hole.

What is claimed: 
     
         1 . A method of manufacturing an ink-jet head, comprising:
 forming a piezoelectric member which forms an ink pressure chamber, and an electrode disposed on a side surface of the piezoelectric member;   attaching the piezoelectric member and a nozzle plate; forming a protection film which covers a surface of the nozzle plate, a peripheral portion of an adhesion part between the piezoelectric member and the nozzle plate, and the electrode; and   removing at least a part of the protection film covering a top surface of the nozzle plate by radiating a laser beam at a peripheral area of a nozzle hole.   
     
     
         2 . The method of  claim 1 , wherein the protection film is formed of an electrically insulative organic material. 
     
     
         3 . The method of  claim 1 , wherein the protection film is formed by vapor-deposition polymerization. 
     
     
         4 . The method of  claim 1 , wherein the nozzle plate is formed of a resin, and an amount of radiation of the laser beam for removing at least the part of the protection film is set in condition that the laser beam does not penetrate the nozzle plate from the top surface thereof to a back surface thereof. 
     
     
         5 . The method of  claim 1 , wherein the nozzle plate is formed of a resin, and a laser beam is radiated on the nozzle plate after the piezoelectric member and the nozzle plate are attached and before the protection film is formed, thereby forming the nozzle hole communicating with the ink pressure chamber. 
     
     
         6 . The method of  claim 1 , wherein the nozzle plate is formed of a metal, and the nozzle hole is formed in advance in the nozzle plate which is yet to be attached to the piezoelectric member.