Positioning device for scanning a surface

Abstract

A positioning device for scanning a surface includes a movable element; at least one spring-like element having a resilience element for providing a tunable resilience in at least one direction; wherein the spring-like element is configured to tune the resilience by applying a force onto the resilience element of the at least one spring-like element.

1 . A positioning device for scanning a surface, comprising:
 a movable element;   at least one spring-like element having a resilience element configured to provide a tunable resilience in at least one direction;   wherein the spring-like element is configured to tune the resilience by applying a force onto the resilience element of the at least one spring-like element.   
     
     
         2 . The positioning device of  claim 1 , further comprising at least one additional spring-like element configured to provide a fixed resilience in at least one direction. 
     
     
         3 . The positioning device of  claim 1 , wherein the resilience element of the at least one spring-like element includes a membrane, a beam, a cantilever and/or a coil. 
     
     
         4 . The positioning device of  claim 1 , wherein the resilience element is configured that its spring constant or resilience, respectively, varies when a deforming force is applied thereon. 
     
     
         5 . The positioning device of  claim 1 , further comprising a tuning element configured to apply the force onto the resilience element. 
     
     
         6 . The positioning device of  claim 5 , wherein the tuning element comprises a tip configured to apply the force onto the resilience element. 
     
     
         7 . The positioning device of  claim 5 , wherein the tuning element is coupled with a setting element configured to displace the tuning element, so that the force is developed by the displacement of the resilience element. 
     
     
         8 . The positioning device of  claim 7 , wherein the setting element comprises a piezoelectric actuator configured to control the displacement of the tuning element by electrical means.