Loading device and sputtering device using same

Abstract

A sputtering device includes a main body and a loading device received in the main body. The main body includes a top portion, a bottom portion, a sidewall connected between the top portion and the bottom portion, an upper bearing mounted on the top portion, and a lower bearing mounted on the bottom portion. The loading device includes an outer frame, an inner frame received in the outer frame, and a gear device arranged between the outer frame and the inner frame. The outer frame is rotatably connected to the upper bearing and includes a plurality of first rods arranged in a first circle. The inner frame is rotatably connected to the lower bearing and includes a plurality of second rods arranged in a second circle. The gear device is configured for rotating the outer frame and the inner frame in opposite directions.

What is claimed is: 
     
         1 . A loading device, comprising:
 an outer frame comprising a plurality of first rods arranged in a first circle;   an inner frame received in the out frame and comprising a plurality of second rods arranged in a second circle; and   a gear device arranged between the outer frame and the in inner frame, the gear device being configured for bringing the outer frame and the inner frame to rotate in two directions reverse to each other.   
     
     
         2 . The loading device of  claim 1 , wherein the outer frame comprises a first plate and a second plate, the first rods are arranged between the first plate and the second plate, each first rod comprises two ends rotatably connected to the first plate and the second plate. 
     
     
         3 . The loading device of  claim 2 , wherein the second plate comprises an inner circumferential surface, the inner circumferential surface is toothed and forms a plurality of inner teethes. 
     
     
         4 . The loading device of  claim 3 , wherein the inner frame comprises a third plate and a fourth plate, the second rods are arranged between the third plate and the fourth plate, each second rod comprises two end respectively rotatably connected to the third plate and the fourth plate. 
     
     
         5 . The loading device of  claim 4 , wherein the fourth plate comprises an outer circumferential surface, the outer circumferential surface is toothed and forms a plurality of outer teethes. 
     
     
         6 . The loading device of  claim 5 , wherein the gear device comprises a rotary shaft, an upper gear, and a lower gear, the upper gear is mounted to one end of the rotary shaft and engages with the inner teeth, the lower gear is adjacent to the upper gear and mounted to the rotary shaft, the rotary shaft passes through a center of the lower gear, the lower gear engages with the outer teeth. 
     
     
         7 . The loading device of  claim 1 , wherein the outer frame is coaxial with the inner frame. 
     
     
         8 . A loading device comprising:
 an outer frame comprising a plurality of first rods, a first plate and a second plate, the first rods arranged between the first plate and the second plate, each of the first rods comprising two ends connected to the first plate and the second plate;   an inner frame received in the outer frame, the inner frame comprising a plurality of second rods, the inner frame comprising a third plate and a fourth plate, the second rods arranged between the third plate and the fourth plate, each of the second rods comprising two end respectively connected to the third plate and the fourth plate;   a gear device arranged between the outer frame and the inner frame, the gear device comprising a rotary shaft, an upper gear, and a lower gear, the upper gear mounted to one end of the rotary shaft, the lower gear adjacent to the upper gear and mounted to the rotary shaft; and   a driving device connected to the other end of the rotary shaft away from the upper gear, wherein the second plate comprises an inner circumferential surface, the inner circumferential surface forms a plurality of inner teethes, the fourth plate comprises an outer circumferential surface, the upper gear engages with the inner teeth, the outer circumferential surface forms a plurality of outer teethes, the lower gear engages with the outer teethes, the driving device brings the gear device to rotate, the upper gear brings the second plate, the lower gear brings the fourth plate to rotate along a direction opposite to the direction that the outer frame rotates.   
     
     
         9 . The loading device of  claim 8 , wherein the first rods rotate opposite to the rotation of the second rods. 
     
     
         10 . The loading device of  claim 8 , wherein the first rods are arranged in a first circle. 
     
     
         11 . The loading device of  claim 8 , wherein the second rods are arranged in a second circle. 
     
     
         12 . The loading device of  claim 8 , wherein the rotary shaft passes through a center of the lower gear. 
     
     
         13 . The loading device of  claim 8 , wherein the outer frame comprises an upper connection portion, the upper connection portion comprises a first pole, a second pole connecting with the first pole, and a upper shaft portion positioned at a joint between the first pole and the second pole. 
     
     
         14 . The loading device of  claim 8 , wherein the outer frame comprises a lower connection portion, the lower connection portion comprises a third pole, a fourth pole connecting with the third pole, and a lower shaft portion positioned at a joint between the third pole and the fourth pole. 
     
     
         15 . The loading device of  claim 8 , wherein a distance between each two adjacent first rods is greater than a diameter of each second rod.