Material sheet handling system and processing methods

Abstract

Methods and apparatus provide for delivering a controlled supply of gas to at least one aero-mechanical device to impart a gas flow to suspend a material sheet; preventing lateral movement of the material sheet in at least one direction when suspended; and imparting a stream of water, from a side of the material sheet opposite the at least one aero-mechanical device, to dice the material sheet when suspended.

1 - 10 . (canceled) 
     
     
         11 . A method, comprising:
 delivering a controlled supply of gas to at least one aero-mechanical device to impart a gas flow to suspend a material sheet;   preventing lateral movement of the material sheet in at least one direction when suspended; and   imparting a stream of water, from a side of the material sheet opposite the at least one aero-mechanical device, to dice the material sheet when suspended.   
     
     
         12 . The method of  claim 11 , wherein the material sheet is a substantially round sheet of semiconductor material. 
     
     
         13 . The method of  claim 12 , further comprising:
 preventing lateral movement of the material sheet in a first direction when suspended; and   imparting streams of water to dice respective opposing lateral pieces from the material sheet in the first direction.   
     
     
         14 . The method of  claim 13 , further comprising:
 preventing lateral movement of the material sheet in a second direction, transverse to the first direction; and   imparting streams of water to dice respective further opposing lateral pieces from the material sheet in the second direction such that the remaining material sheet is substantially rectangular.   
     
     
         15 . The method of  claim 14 , further comprising:
 preventing lateral movement of the material sheet in the first direction when suspended; and   imparting streams of water to chamfer respective opposing edges of the material sheet in the first direction.   
     
     
         16 . The method of  claim 15 , further comprising:
 preventing lateral movement of the material sheet in the second direction, transverse to the first direction; and   imparting streams of water to chamfer respective further opposing lateral edges of the material sheet in the second direction.   
     
     
         17 . The method of  claim 16 , further comprising:
 flipping the material sheet over;   preventing lateral movement of the material sheet in the first direction when suspended; and   imparting streams of water to chamfer respective opposing edges of the material sheet in the first direction.   
     
     
         18 . The method of  claim 17 , further comprising:
 preventing lateral movement of the material sheet in the second direction, transverse to the first direction; and   imparting streams of water to chamfer respective further opposing lateral edges of the material sheet in the second direction.