Methods and Apparatus for Ex Situ Seasoning of Electronic Device Manufacturing Process Components

Abstract

In one aspect, a method of improving the performance of an electronic device manufacturing facility is provided, including the step of reducing the number of electronic device manufacturing component seasoning steps which are performed using production equipment, whereby the amount of electronic device manufacturing system downtime is reduced. Several other aspects are provided.

What is claimed is: 
     
         1 . A system for seasoning a component of an electronic device manufacturing system, the component having a face-side, a backside, and a surface defining an orifice that extends between the face-side and the backside, the system comprising:
 a seasoning chamber;   a gas supply connected to the seasoning chamber;   a fixture configured to support the component inside of the seasoning chamber so that the ends of the orifice are exposed when the component is on the fixture;   a vacuum pump connected to the fixture and operable to create a pressure differential across the face-side and the backside of the component; and   an upper electrode and a lower electrode operable to create a plasma inside of the seasoning chamber;   wherein the fixture is further configured so that the plasma is drawn through the orifice of the component in response to the pressure differential across the face-side and the backside of the component.   
     
     
         2 . The system of  claim 1  wherein the upper electrode comprises a wall of the seasoning chamber. 
     
     
         3 . The system of  claim 1  wherein the lower electrode comprises the fixture.