Dielectric film, method for manufacturing the same, and transducer including the same

Abstract

A dielectric film includes an elastomer, and metallic oxide particles having a particle diameter of 100 nm or less that are chemically bonded to the elastomer and are dispersed in the elastomer in a state of primary particles. A method for manufacturing the dielectric film includes: a chelating process of adding a chelating agent to an organometallic compound to produce a chelate compound of the organometallic compound; a sol manufacturing process of adding an organic solvent and water to the chelate compound to obtain a sol of metallic oxide particles produced by the hydrolytic reaction of the organometallic compound; a mixed solution preparing process of mixing the sol of the metallic oxide particles and a polymer solution containing a rubber polymer having functional groups that optionally react with hydroxy groups; and a film forming process of applying the mixed solution onto a substrate, and curing the resultant coating film.

1 . A dielectric film for use in a transducer, characterized in that
 the dielectric film is produced from a liquid composition containing metallic oxide particles that are synthesized by hydrolytic reaction of an organometallic compound and that have a hydroxy group, and a polymer solution containing a rubber polymer having a functional group that optionally reacts with the hydroxy group of the metallic oxide particles, and   the dielectric film includes:
 an elastomer; and 
 the metallic oxide particles having a particle diameter of 100 nm or less that are chemically bonded to the elastomer and are dispersed in the elastomer in a state of primary particles. 
   
     
     
         2 . The dielectric film according to  claim 1 , wherein the functional group is one or more groups selected from a carboxy group, an amino group, and an epoxy group. 
     
     
         3 . The dielectric film according to  claim 1 , wherein the metallic oxide particles include one or more elements selected from titanium, zirconium, and silicon. 
     
     
         4 . The dielectric film according to  claim 1 , wherein the median diameter of the metallic oxide particles is 10 nm or more and 50 nm or less. 
     
     
         5 . The dielectric film according to  claim 1 , wherein the content of the metallic oxide particles is 1 part by mass or more and 20 parts by mass or less with respect to 100 parts by mass of the elastomer. 
     
     
         6 . A method for manufacturing the dielectric film according to  claim 1 , the method characterized by comprising:
 a chelating process of adding a chelating agent to an organometallic compound to produce a chelate compound of the organometallic compound;   a sol manufacturing process of adding an organic solvent and water to the chelate compound to obtain a sol of metallic oxide particles produced by hydrolytic reaction of the organometallic compound;   a mixed solution preparing process of mixing the sol of the metallic oxide particles and a polymer solution containing a rubber polymer having a functional group that optionally reacts with a hydroxy group to prepare a mixed solution; and   a film forming process of applying the mixed solution onto a substrate and curing a resultant coating film to obtain a dielectric film.   
     
     
         7 . A transducer characterized by comprising:
 the dielectric film according to  claim 1 ; and   a plurality of electrodes that are arranged via the dielectric film.