Mim capacitor

Abstract

A method of forming a metal- insulator-metal capacitor having top and bottom plates separated by a dielectric layer, one of the top and bottom plates having at least one protrusion extending into a corresponding cavity in the other of the top and bottom plates, the method including the steps of growing one or more nanofibers on a base surface.

What is claimed is: 
     
         1 . A capacitor comprising top and bottom plates separated by a dielectric layer, at least one of the top and bottom plates being formed of metal, one of said top and bottom plates comprising at least one protrusion extending into a corresponding cavity in the other of said top and bottom plates, wherein each of said at least one protrusion comprises a nanofiber. 
     
     
         2 . The capacitor of  claim 1 , wherein said nanofibers are coated with a metallic layer. 
     
     
         3 . The capacitor of  claim 2 , wherein said metallic layer is coated with a layer of dielectric material forming said dielectric layer. 
     
     
         4 . The capacitor of  claim 1 , wherein said nanofibers are conducting. 
     
     
         5 . The capacitor of  claim 4 , wherein said nanofibers are coated with a layer of dielectric material forming said dielectric layer. 
     
     
         6 . The capacitor of  claim 4 , wherein said nanofibers are formed on a base surface of a conductive material, and wherein said nanofibers and said base surface form one of said top and bottom plates. 
     
     
         7 . The capacitor of  claim 1 , wherein said nanofibers are formed on a base surface comprising at least one of nickel and cobalt. 
     
     
         8 . The capacitor of  claim 1 , wherein said nanofibers comprise carbon nanofibers. 
     
     
         9 . The capacitor of  claim 1 , wherein said nanofibers have a diameter of less than 50 nm. 
     
     
         10 . A capacitor comprising top and bottom plates separated by a dielectric layer, at least one of the top and bottom plates being formed of metal, wherein one of said top and bottom plates comprising at least one protrusion extending into a corresponding cavity in the other of said top and bottom plates, said cavity formed by removal of a nanofiber. 
     
     
         11 . The capacitor of  claim 10 , wherein said cavity has a diameter of less than 50 nm. 
     
     
         12 . The capacitor of  claim 10 , wherein one of said top and bottom plates comprises a base surface comprising at least one of nickel and cobalt, said cavities extending from said base surface. 
     
     
         13 . The capacitor of  claim 12 , wherein said base surface lines a trench formed in a layer of insulating material. 
     
     
         14 . The capacitor of  claim 10 , wherein a surface of said cavity is coated with a layer of dielectric material forming said dielectric layer, and wherein said dielectric layer is coated with a metallic layer forming said at least one protrusion.