Filter, exposure apparatus, and method of manufacturing device

Abstract

A filter reflects first light having a first wavelength, and transmits second light having a second wavelength shorter than the first wavelength. The filter includes a plurality of plate members positioned parallel to each other with gaps therebetween in a first direction. An enveloping surface formed by end surfaces of the plurality of plate members forms a flat surface, which is nonparallel to the first direction. The filter transmits the second light to the second direction.

What is claimed is: 
     
         1 . A filter which reflects first light having a first wavelength, and transmits second light having a second wavelength shorter than the first wavelength, the filter comprising
 a plurality of plate members positioned parallel to each other with gaps there between in a first direction, and extend in a second direction perpendicular to the first direction,   wherein an enveloping surface formed by end surfaces of said plurality of plate members forms a flat surface, which is nonparallel to the first direction, and   wherein the filter transmits the second light to the second direction.   
     
     
         2 . A filter which reflects first light having a first wavelength, and transmits second light having a second wavelength shorter than the first wavelength, the filter comprising
 a member which includes a plurality of openings arranged in at least a first direction, and extends in a second direction perpendicular to the first direction,   wherein an end surface of said member forms a flat surface, which is nonparallel to the first direction, and   wherein the filter transmits the second light to the second direction.   
     
     
         3 . A filter which reflects first light having a first wavelength, and transmits second light having a second wavelength shorter than the first wavelength, the filter comprising
 a plurality of plate members positioned with gaps there between in a first direction,   wherein an enveloping surface formed by first end surfaces of said plurality of plate members forms a flat surface, which is nonparallel to the first direction, and   wherein the gap between at least one set of adjacent plate members, among said plurality of plate members, in the first end surfaces is larger than the gap between said at least one set of adjacent plate members in second end surfaces thereof opposite to the first end surfaces.   
     
     
         4 . A filter which reflects first light having a first wavelength, and transmits second light having a second wavelength shorter than the first wavelength, the filter comprising
 a member which includes a plurality of openings arranged in at least a first direction, and extends in a second direction perpendicular to the first direction,   wherein a first end surface of said member forms a flat surface, which is nonparallel to the first direction, and   wherein at least one opening among said plurality of openings is larger in the first end surface than in a second end surface of said member, that is opposite to the first end surface.   
     
     
         5 . A filter which reflects first light having a first wavelength, and transmits second light having a second wavelength shorter than the first wavelength, the filter comprising
 an end surface including a plurality of openings arranged in at least a first direction,   wherein said end surface forms a curved surface, and a position of the center of curvature of the curved surface in the first direction falls outside a range, in the first direction, of one region including all of said plurality of openings.   
     
     
         6 . The filter according to  claim 5 , wherein said plurality of openings are formed by a plurality of plate members positioned parallel to each other with gaps there between in at least the first direction. 
     
     
         7 . The filter according to  claim 5 , wherein said plurality of openings include openings provided in a member extending in a second direction perpendicular to the first direction.