Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method

Abstract

A method for producing a representation of an object using a particle beam, as well as a particle beam device for carrying out the method are disclosed. The system described herein is based on the object of specifying the method and the particle beam device for producing a representation of an object such that images which are produced, in particular including FFT images, are as free as possible of artifacts which are not caused by the object to be examined. This is achieved in particular in that pixel lives, line flyback times and pixel pause times are varied in raster patterns.

1 - 10 . (canceled) 
     
     
         11 . A method for producing a representation of an object using a particle beam, wherein the particle beam is made available by a particle beam device having at least one particle beam column, wherein the particle beam column has a beam generator for generating a particle beam, and has an objective lens for focusing the particle beam onto the object, the method comprising:
 defining at least one raster area on the object, wherein the raster area has at least one first raster point, at least one second raster point and at least one third raster point;   defining a raster pattern, wherein the raster pattern defines guidance of the particle beam through the raster area;   generating the particle beam;   passing the particle beam to a start point, which is defined by at least one of the following raster points: the first raster point, the second raster point or the third raster point;   guiding the particle beam from the start point over the raster area in accordance with the raster pattern, wherein the particle beam is guided to the first raster point at a first time, to the second raster point at a second time, and to the third raster point at a third time;   detecting at least one of: interaction particles or interaction radiation, wherein the at least one of: interaction particles and the interaction radiation are or is created by interaction of the particle beam with the object,   wherein the first time, the second time and the third time are chosen such that a first time interval, which is defined by a first difference between the first time and the second time, and a second time interval, which is defined by a second difference between the first time and the third time, are different.   
     
     
         12 . The method according to  claim 11 , wherein the particle beam remains at the first raster point for a first time period, at the second raster point for a second time period and at the third raster point for a third time period, and wherein the method further comprises at least one of the following features:
 the first time period, the second time period and the third time period are identical to one another, or   at least one of the following time periods, specifically the first time period, the second time period and the third time period, are different to one of the further ones of the following time periods, specifically the first time period, the second time period and the third time period.   
     
     
         13 . The method according to  claim 11 , wherein the defining a raster pattern comprises defining a spiral or a rectangular raster pattern. 
     
     
         14 . The method according to  claim 11 ,
 wherein the particle beam is guided over the raster area at least a first time in order to produce a first representation, and is guided over the raster area at least a second time in order to produce a second representation, and   wherein the first representation and the second representation are combined using an averaging method or integration method to form a final representation.   
     
     
         15 . The method according to  claim 11 ,
 wherein the particle beam is guided over the raster area at least a first time in order to produce a first representation and over the raster area at least a second time in order to produce a second representation,   wherein the first representation and the second representation are produced using different raster parameters, and   wherein the first representation and the second representation are combined using an averaging method to form a final representation.   
     
     
         16 - 20 . (canceled) 
     
     
         21 . A particle beam device, comprising:
 at least one first particle beam column, wherein the first particle beam column has a first beam generator for generating a first particle beam, and a first objective lens for focusing the first particle beam onto an object;   at least one first control unit for defining a first raster area on the object and for defining a first raster pattern, wherein the first raster area has at least one first raster point, at least one second raster point and at least one third raster point, and wherein the first raster pattern defines guidance of the first particle beam through the first raster area;   at least one first raster device for guiding the first particle beam over the object in accordance with the first raster pattern, wherein the first raster device provides that the particle beam is guided to the first raster point at a first time, to the second raster point at a second time and to the third raster point at a third time;   at least one first detection unit for detection of at least one of: interaction particles or interaction radiation,   wherein the first control unit provides that the first time, the second time and the third time are chosen such that a first time interval, which is defined by a first difference between the first time and the second time, and a second time interval, which is defined by a second difference between the first time and the third time, are different.   
     
     
         22 . The particle beam device according to  claim 21 , further comprising:
 at least one third control unit for defining a second raster area on the object and for defining a second raster pattern;   at least one second particle beam column, wherein the second particle beam column has a second beam generator for generating a second particle beam, a second objective lens for focusing the second particle beam onto the object, and at least one second raster device for guiding the second particle beam over the object in accordance with the second raster pattern; and   at least one second detection unit for detection of at least one of: the interaction particles or the interaction radiation.   
     
     
         23 . The particle beam device according to  claim 22 ,
 wherein the third control unit provides that the second raster area is defined by a multiplicity of raster lines, wherein the multiplicity of raster lines have at least one third raster line and at least one fourth raster line, wherein the third raster line has a multiplicity of raster points, which have at least one fifth raster point and at least one sixth raster point, wherein the fourth raster line has a multiplicity of further raster points, which have at least one seventh raster point and at least one eighth raster point, and wherein the second particle beam remains at at least one of: the fifth raster point for a seventh time period, the sixth raster point for an eighth time period, the seventh raster point for a ninth time period or the eighth raster point for a tenth time period, wherein there is an eleventh time period between guidance of the second particle beam over the third raster line and guidance of the second particle beam over the fourth raster line, wherein the multiplicity of raster lines define a multiplicity of eleventh time periods, and wherein there is a twelfth time period during guidance of the second particle beam between scanning of at least one of the following raster points, specifically the fifth raster point, the sixth raster point, the seventh raster point and the eighth raster point, using the second particle beam, and scanning of a further and different one of the following raster points, specifically the fifth raster point, the sixth raster point, the seventh raster point and the eighth raster point, using the second particle beam, wherein the multiplicity of raster points define a multiplicity of twelfth time periods,   and wherein the particle beam device is provided with at least one fourth control unit for varying at least one of the following time periods, specifically the seventh time period, the eighth time period, the ninth time period, the tenth time period, the eleventh time period and the twelfth time period.   
     
     
         24 . The particle beam device according to  claim 22 , wherein the third control unit provides that the second raster area is defined by at least one fifth raster point, at least one sixth raster point and at least one seventh raster point, and wherein the second raster pattern is defined to have a rectangular or spiral shape. 
     
     
         25 . The particle beam device according to  claim 21 , wherein the particle beam device further comprises at least one of the following features:
 the first particle beam column is in the form of an electron beam column, and the second particle beam column is in the form of an ion beam column,   the first particle beam column is in the form of an ion beam column, and the second particle beam column is in the form of an electron beam column, or   the first particle beam column is in the form of an ion beam column, and the second particle beam column is in the form of an ion beam column.   
     
     
         26 . (canceled)