Polishing pad comprising transmissive region

Abstract

The invention provides a polishing pad comprising an optically transmissive region, wherein the polishing pad comprises a polishing pad body comprising an opaque first region and an optically transmissive second region, wherein the second region has at least one recess formed therein of at least one part of the polishrag pad body, and at least one translucent window insert is integrated into the at least one recessed area. The polishing pad body and the at least one translucent window insert comprise different porous. materials.

1 . A polishing pad comprising an optically transmissive region, wherein the polishing pad comprises: (a) a polishing pad body comprising a first region and a second region, wherein the first region is opaque, wherein the second region is optically transmissive, wherein the second region has at least one recess formed therein, and (b) at least one translucent insert integrated into the at least one recess, wherein the polishing pad body comprises a first porous material and the at least one translucent insert comprises a second porous material that differs from the first porous material. 
     
     
         2 . The polishing pad of  claim 1 , wherein the polishing pad body comprises a first thermoplastic polymer and the at least one translucent insert comprises a second thermoplastic polymer that differs from the first thermoplastic polymer. 
     
     
         3 . The polishing pad of  claim 1 , wherein the translucent insert comprises a first thermoplastic polymer and a second thermoplastic polymer, and wherein the first and second thermoplastic polymers are immiscible and form distinct phases within the translucent window. 
     
     
         4 . The polishing pad of  claim 1 , wherein the translucent insert further comprises particles of a material that differs from the second porous material. 
     
     
         5 . The polishing pad of  claim 4 , wherein the particles comprise a material that is soluble in water. 
     
     
         6 . The polishing pad of  claim 1 , wherein the translucent insert has a void volume of 0.1% to 10%. 
     
     
         7 . The polishing pad of  claim 1 , wherein the translucent insert has a polishing surface with a texture. 
     
     
         8 . The polishing pad of  claim 1 , wherein the second region has a first recess and a second recess formed therein, and wherein the first recess has a first translucent insert integrated therein, and the second recess has a second translucent insert integrated therein. 
     
     
         9 . The polishing pad of  claim 8 , wherein the face of the polishing pad body comprising the second recess defines a plane, and wherein a surface of the second translucent insert is substantially coplanar with the plane. 
     
     
         10 . The polishing pad of  claim 8 , wherein the face of the polishing pad body comprising the second recess defines a plane, and wherein a surface of the second translucent insert extends beyond the plane. 
     
     
         11 . A method for making a polishing pad having an optically transmissive region, comprising the steps of:
 (a) providing a polishing pad body, wherein the polishing pad body comprises a first porous material,   (b) forming at least one recess within the polishing pad body,   (c) providing at least one translucent insert, wherein the translucent insert comprises a second porous material that differs from the first porous material, and   (d) adhering the at least one translucent insert to the recess to provide a polishing pad having at least one optically transmissive region.   
     
     
         12 . The method of  claim 11 , wherein the polishing pad body comprises a first thermoplastic polymer and the at least one translucent insert comprises a second thermoplastic polymer that differs from the first thermoplastic polymer. 
     
     
         13 . The method of  claim 11 , wherein the translucent insert comprises a first thermoplastic polymer and a second thermoplastic polymer, and wherein the first and second thermoplastic polymers are immiscible and form distinct phases within the translucent insert. 
     
     
         14 . The method of  claim 11 , wherein the translucent insert further comprises particles of a material that differs from the second porous material. 
     
     
         15 . The method of  claim 11 , wherein the translucent insert is formed prior to adhering the translucent insert to the recess. 
     
     
         16 . The method of  claim 11 , wherein the translucent insert is formed by placement of a precursor of the translucent insert within the recess and then conversion of the precursor to the translucent insert. 
     
     
         17 . The method of  claim 11 , wherein the step of forming a recess within the polishing pad body comprises use of an energy input selected from the group consisting of pressure, heat, radio frequency irradiation, ultrasonic welding, and combinations thereof. 
     
     
         18 . The method of  claim 11 , wherein the step of forming a recess within the polishing pad body comprises use of a router tool. 
     
     
         19 . The method of  claim 11 , wherein the step of adhering the at least one translucent insert to the recess comprises use of an energy input selected from the group consisting of solvent adhesion, pressure, heat, radio frequency irradiation, ultrasonic welding, and combinations thereof. 
     
     
         20 . The method of  claim 1 , wherein the translucent insert has a polishing surface with a texture.