Film-forming apparatus and film-forming method

Abstract

A film-forming apparatus ( 100 ) and method capable of film lamination with superior evenness and good followability regardless of the size, shape and number of articles being laminated. The film-forming apparatus ( 100 ) provided has a first chamber ( 10, 11 ) that is provided with a heating means ( 50, 51 ) and that is capable of maintaining a vacuum or a pressurized state, a second chamber ( 20, 21 ) that is disposed so as to be able to be joined to, and separated from, the first chamber ( 10, 11 ), that is provided with a movable supporting table ( 60, 61 ) on which an article ( 300, 310, 320 ) is supported and that is capable of maintaining a vacuum or a pressurized state, a frame-like film holding member ( 30, 31 ) that is disposed between the first chamber ( 10, 11 ) and the second chamber ( 20, 21 ) and that holds a film ( 200, 210 ), and an auxiliary film pressing tool ( 40, 41, 42 ) having a film pressing part ( 42 a ) that inhibits lifting of the film ( 200, 210 ) when the film is laminated on a surface of the article ( 300, 310, 320 ).

1 . A film-forming apparatus that laminates a film on a surface of an article, said apparatus comprising:
 a first chamber having a heating means and being capable of maintaining a vacuum or a pressurized state;   a second chamber that is disposed so as to be able to be joined to, and separated from, the first chamber, that is provided with a movable supporting table on which an article is supported, and that is capable of maintaining a vacuum or a pressurized state;   a frame-like film holding member that is disposed between the first chamber and the second chamber and that holds a film; and   an auxiliary film pressing tool having a film pressing part that inhibits lifting of the film when the film is laminated on the surface of the article, wherein the film pressing part is disposed in a position corresponding to a gap zone between articles in cases where a plurality of articles is supported on the supporting table in the second chamber, and the auxiliary film pressing tool is disposed in a removable manner.   
     
     
         2 . The film-forming apparatus described in  claim 1 , wherein the film pressing part of the auxiliary film pressing tool has a shape and a disposition according to a region in which lifting of the film occurs when laminating the film on the surface of a single article or a plurality of articles without using this supporting tool. 
     
     
         3 . (canceled) 
     
     
         4 . The film-forming apparatus described in  claim 1 , wherein the film pressing part of the auxiliary film pressing tool comprises a rod-like or band-like rigid member. 
     
     
         5 . The film-forming apparatus described in  claim 1 , wherein the auxiliary film pressing tool further comprises a pressure sensitive adhesive layer on the surface that comes into contact with the film when laminating the film on the surface of an article. 
     
     
         6 . A film-forming apparatus that laminates a film on a surface of an article, said apparatus comprising:
 a first chamber provided with a heating means and being capable of maintaining a vacuum or a pressurized state;   a second chamber disposed so as to be able to be joined to, and separated from, the first chamber, provided with a movable supporting table on which a plurality of articles are supported, and capable of maintaining a vacuum or a pressurized state;   a frame-like film holding member that is disposed between the first chamber and the second chamber and that holds a film; and   an auxiliary film pressing tool attached to a bottom of the first chamber or the film holding member and having a film pressing part that inhibits lifting of the film when the film is laminated on a surface of the article, wherein the film pressing part is disposed in a position corresponding to a gap zone between articles in cases where a plurality of articles is supported on the supporting table in the second chamber, and the auxiliary film pressing tool is disposed in a removable manner.   
     
     
         7 . A method for film-forming, said method comprising:
 providing a first chamber having a heating means and being capable of maintaining a vacuum or a pressurized state;   providing a second chamber capable of maintaining a vacuum or a pressurized state, and having a supporting table disposed therein;   separating the first chamber from the second chamber so as to obtain an open state at atmospheric pressure;   disposing a plurality of articles on the supporting table in the second chamber;   attaching an auxiliary film pressing tool either to a bottom of the first chamber or between the first chamber and the second chamber, with the auxiliary film pressing tool being disposed in a removable manner and having a film pressing part;   disposing the film pressing part in a position corresponding to a gap zone between articles;   holding a film between the first chamber and the second chamber;   forming an enclosed region in both the first chamber and the second chamber with the film respectively;   forming a vacuum in both the first chamber and the second chamber; and   pressurizing only the first chamber to atmospheric pressure or higher, moving the supporting table in the second chamber towards the first chamber, and partially pressing the film by means of the pressure difference between the chambers and the auxiliary film pressing tool so as to laminate the film sheet on a surface of a single article or a plurality of articles.   
     
     
         8 . The film-forming apparatus described in  claim 2 , wherein the film pressing part of the auxiliary film pressing tool comprises a rod-like or band-like rigid member. 
     
     
         9 . The film-forming apparatus described in  claim 2 , wherein the auxiliary film pressing tool further comprises a pressure sensitive adhesive layer on the surface that comes into contact with the film when laminating the film on the surface of an article. 
     
     
         10 . The film-forming apparatus described in  claim 4 , wherein the auxiliary film pressing tool further comprises a pressure sensitive adhesive layer on the surface that comes into contact with the film when laminating the film on the surface of an article. 
     
     
         11 . The film forming apparatus described in  claim 1 , wherein the auxiliary film pressing tool is disposed in a removable manner so that a suitable auxiliary film pressing tool can be attached for each article used. 
     
     
         12 . The film forming apparatus described in  claim 6 , wherein the auxiliary film pressing tool is disposed in a removable manner so that a suitable auxiliary film pressing tool can be attached for each article used.