High hardness material working method and working apparatus

Abstract

The present invention provides a method of working a high hardness material including the steps of heating the high hardness material, working the high hardness material by using a polishing tool, cooling the polishing tool at a position which is different from a worked part, and washing the polishing tool at a position which is different from the worked part.

1 . A method of working a high hardness material by making the high hardness material touch a rotating polishing tool while making the high hardness material rotating comprising the steps of:
 heating the high hardness material to a temperature higher than a predetermined working temperature at a position different from a worked part so as to become the working temperature at that worked part and thereby forming a softened layer with a hardness lower than a surface layer of the high hardness material;   working the high hardness material by making the polishing tool rotate at a speed such that the temperature of the polishing tool which rises due to heat input from the high hardness material at worked part to the polishing tool becomes no more than a heat resistance temperature of the polishing tool while making the high hardness material touch the polishing tool;   cooling the polishing tool at a position which is different from the worked part; and   washing the polishing tool at a position which is different from the worked part.   
     
     
         2 . The method of working a high hardness material as set forth in  claim 1  characterized by detecting a temperature and working resistance of the worked part of the high hardness material and controlling an output of a heating source which heats the high hardness material in accordance with the detected value. 
     
     
         3 . The method of working a high hardness material as set forth in  claim 1  wherein the heating of the high hardness material is dielectric heating, induction heating, or radiant heating. 
     
     
         4 . The method of working a high hardness material as set forth in  claim 1  wherein the high hardness material is SiC and in that the polishing tool is cBN. 
     
     
         5 . A working apparatus which works a high hardness material by making it rotate while making it abut against a rotating polishing tool comprising:
 a heating device which heats the high hardness material at a position different from a worked part;   a cooling device which cools the polishing tool at a position which is different from the worked part; and   a washing device which washes the polishing tool at a position which is different from the worked part.