Method, mask and system for manufacturing solar cell

Abstract

A method of manufacturing a solar cell according to an aspect includes detecting a positioning pattern that includes at least a part of an ion implantation pattern in which an ion is implanted into a predetermined region of a solar cell substrate, and performing relative positioning between a process unit and the solar cell substrate, wherein the process unit executes a predetermined process based on the detected positioning pattern when the predetermined process is executed to the solar cell substrate.

What is claimed is: 
     
         1 . A method of manufacturing a solar cell, comprising:
 detecting a positioning pattern that includes at least a part of an ion implantation pattern in which an ion is implanted into a predetermined region of a solar cell substrate; and   performing relative positioning between a process unit and the solar cell substrate, wherein   the process unit executes a predetermined process based on the detected positioning pattern when the predetermined process is executed to the solar cell substrate.   
     
     
         2 . The method of manufacturing a solar cell according to  claim 1 , wherein
 the ion implantation pattern includes a first pattern that corresponds to a contact electrode of a solar cell, and a second pattern used as the positioning pattern.   
     
     
         3 . The method of manufacturing a solar cell according to  claim 1 , wherein
 the positioning pattern is a part that is a non-repetitious pattern of the ion implantation pattern.   
     
     
         4 . The method of manufacturing a solar cell according to  claim 1 , wherein
 the positioning pattern is detected based on a difference in concentration of impurity distributed in the solar cell substrate in the detecting.   
     
     
         5 . The method of manufacturing a solar cell according to  claim 2 , wherein
 the positioning pattern is detected based on a difference in concentration of impurity distributed in the solar cell substrate in the detecting.   
     
     
         6 . The method of manufacturing a solar cell according to  claim 3 , wherein
 the positioning pattern is detected based on a difference in concentration of impurity distributed in the solar cell substrate in the detecting.   
     
     
         7 . The method of manufacturing a solar cell according to  claim 1 , wherein
 the positioning pattern is detected based on a difference in type of impurity distributed in the solar cell substrate in the detecting.   
     
     
         8 . The method of manufacturing a solar cell according to  claim 2 , wherein
 the positioning pattern is detected based on a difference in type of impurity distributed in the solar cell substrate in the detecting.   
     
     
         9 . The method of manufacturing a solar cell according to  claim 3 , wherein
 the positioning pattern is detected based on a difference in type of impurity distributed in the solar cell substrate in the detecting.   
     
     
         10 . A mask for manufacturing a solar cell, the mask being used when implanting an ion into a solar cell substrate, the mask comprising:
 a predetermined mask pattern, wherein   the predetermined mask pattern includes a first mask pattern that corresponds to a contact electrode of a solar cell, and a second mask pattern used for forming a positioning pattern of the substrate.   
     
     
         11 . A system for manufacturing a solar cell, comprising:
 a retrieving unit for retrieving information of a positioning pattern that includes at least a part of an ion implantation pattern in which an ion is implanted into a predetermined region of a solar cell substrate;   a positioning unit for performing relative positioning between a process unit and the solar cell substrate, wherein the process unit executes a process based on the retrieved positioning pattern when the predetermined process is executed to the solar cell substrate; and   a process unit for executing the predetermined process to the predetermined region of the solar cell substrate.   
     
     
         12 . The system for manufacturing a solar cell according to  claim 11 , wherein
 the process unit forms an electrode so as to overlap with at least a part of the ion implantation pattern.