Process for manufacturing a wafer by annealing of buried channels

Abstract

A process for manufacturing an SOI wafer, including the steps of: forming, in a wafer of semiconductor material, cavities delimiting structures of semiconductor material; thinning out the structures through a thermal process; and completely oxidizing the structures.

1 .- 32 . (canceled) 
     
     
         33 . A semiconductor structure, comprising:
 a closed cavity; and   an epitaxial layer disposed over the cavity.   
     
     
         34 . The semiconductor structure of  claim 33  wherein the closed cavity has a shape that includes a substantially circular cross-section. 
     
     
         35 . The semiconductor structure of  claim 33  wherein the epitaxial layer surrounds the closed cavity. 
     
     
         36 . A semiconductor structure, comprising:
 a region;   a cavity disposed in the region and formed by
 forming an opening in the region, and 
 annealing the region; and 
   an epitaxial layer disposed over the cavity.   
     
     
         37 . The semiconductor structure of  claim 36  further comprising a circuit component disposed in the region and adjacent the cavity, the component operable to generate a signal. 
     
     
         38 . The semiconductor structure of  claim 36  wherein forming the cavity includes growing an epitaxial layer to close the cavity before annealing the region. 
     
     
         39 . A system, comprising:
 a first integrated circuit, comprising
 a semiconductor structure, comprising:
 a closed cavity; and 
 an epitaxial layer disposed over the cavity; 
 
   a second integrated circuit coupled to the first integrated circuit.   
     
     
         40 . The system of  claim 39  wherein the first and second integrated circuits are disposed on a same die. 
     
     
         41 . The system of  claim 39  wherein the first and second integrated circuits are disposed on respective dies. 
     
     
         42 . The system of  claim 39  wherein the second integrated circuit comprises a controller.