Trichlorosilane vaporization system

Abstract

A heat exchanger for vaporizing a liquid and a method of using the same are disclosed. The heat exchanger includes a housing, a tube, a heater, and a plurality of non-reactive members. The tube is disposed in the interior of the housing and has an inlet and an outlet. The heater is configured to heat the tube. The plurality of non-reactive members are disposed in an interior cavity of the tube in an arrangement such that a plurality of voids are defined between the members and the tube. The arrangement also permits liquid to pass through the voids and travel from the inlet of the tube to the outlet of tube. The plurality of non-reactive members and the tube transfer heat to the liquid as the liquid passes through the plurality of voids in order to vaporize the liquid.

What is claimed is: 
     
         1 . A method of vaporizing a liquid, the method comprising:
 initiating a flow of the liquid into an inlet of a tube in a heat exchanger, the tube including spherical members;   heating the tube in the heat exchanger;   vaporizing the liquid into a gas by passing the liquid through the tube, wherein the spherical members are heated by a heat source and wherein the spherical members transfer heat to the liquid as the liquid passes through a plurality of voids defined between the spherical members and the tube; and   removing the gas from the heat exchanger.   
     
     
         2 . The method of vaporizing a liquid of  claim 1  wherein the tube in the heat exchanger is heated by a resistive heater. 
     
     
         3 . The method of vaporizing a liquid of  claim 1  wherein the spherical members are disposed in an interior cavity of the tube such that the liquid is able to flow through a plurality of voids disposed between the plurality of spherical members. 
     
     
         4 . The method of vaporizing a liquid of  claim 1  further comprising mixing the gas removed from the heat exchanger with a first gas. 
     
     
         5 . A method of vaporizing liquid trichlorosilane, the method comprising:
 initiating a flow of liquid trichlorosilane into an inlet of a first heat exchanger;   partially vaporizing the liquid trichlorosilane into a gas state by passing the trichlorosilane through a first tube having a plurality of non-reactive members in the first heat exchanger, wherein the non-reactive members are heated by a first heat source and wherein the non-reactive members transfer heat to the trichlorosilane as the trichlorosilane passes through the non-reactive members;   removing the partially vaporized trichlorosilane from the first heat exchanger;   mixing the partially vaporized trichlorosilane with a first gas, resulting in a mixture of partially vaporized trichlorosilane and the first gas;   initiating a flow of the mixture of partially vaporized trichlorosilane and the first gas into a second tube in a second heat exchanger, the second tube including non-reactive members;   vaporizing the mixture of partially vaporized trichlorosilane and the first gas by passing the mixture through the second tube, wherein the non-reactive members are heated by a second heat source and wherein the non-reactive members transfers heat to mixture as the mixture passes through the non-reactive members; and   removing the mixture of vaporized trichlorosilane and first gas from the second heat exchanger.   
     
     
         6 . The method of  claim 5  wherein the non-reactive members in the first tube and the second tube are a plurality of spherical members formed from one of stainless steel and titanium. 
     
     
         7 . The method of  claim 6  wherein each of the plurality of spherical members in the first tube have a diameter less than half of a diameter of the first tube and wherein each of the plurality of spherical members in the second tube have a diameter less than half of a diameter of the second tube.