Gas delivery system

Abstract

A gas flow bubbler system for delivering a precursor gas to a production chamber, the bubbler system comprising: a bubbler for containing precursor molecules in a liquid phase; a cyclone separator for removing aerosol particles from the precursor gas; and a tube through which precursor gas generated in the bubbler flows to the cyclone separator.

1 . A gas flow bubbler system for delivering a precursor gas to a production chamber, the bubbler system comprising:
 a bubbler for containing precursor molecules in a liquid phase;   a cyclone separator for removing aerosol particles from the precursor gas; and   a tube through which precursor gas generated in the bubbler flows to the cyclone separator.   
     
     
         2 . A gas flow bubbler system according to  claim 1  and comprising a rotary flow unit through which gas from the bubbler flows on its way to the cyclone separator. 
     
     
         3 . A gas flow bubbler system according to  claim 2  wherein the rotary flow unit comprises cyclone fins that impart rotary flow to the gas. 
     
     
         4 . A gas flow bubbler system according to  claim 2  wherein the rotary flow unit is coupled to a heater that heats gas flowing through the rotary flow unit. 
     
     
         5 . A gas flow bubbler system according to  claim 1  wherein the cyclone separator has a central axis and the tube through which the precursor gas flows to the cyclone separator is positioned so that the precursor gas flows into the cyclone separator off center of the central axis. 
     
     
         6 . A gas flow bubbler system according to  claim 1  wherein the cyclone separator is coupled to the bubbler so that aerosol particles removed from the precursor gas by the cyclone separator are returned to the bubbler. 
     
     
         7 . A gas flow bubbler system according to  claim 6  and comprising a pump which aspirates gas from the cyclone separator to the bubbler.