Target supply device

Abstract

A target supply device includes a nozzle portion, a cover, a first electrode, and a potential controller. The nozzle portion has a through-hole defined therein to allow a target material to be discharged therethrough. The cover includes an electrically conductive material and is disposed to cover the nozzle portion. The cover has a through-hole defined therein to allow the target material to pass therethrough. The first electrode is disposed on the cover. The first electrode has a through-hole to allow the target material to pass therethrough. The potential controller is configured to control the first electrode to have a first potential that is lower than a second potential of the cover.

What is claimed is: 
     
         1 . A target supply device, comprising:
 a nozzle portion having a through-hole defined therein to allow a target material to be discharged therethrough;   a cover including an electrically conductive material and disposed to cover the nozzle portion, the cover having a through-hole defined therein to allow the target material to pass therethrough;   a first electrode disposed on the cover, the first electrode having a through-hole to allow the target material to pass therethrough; and   a potential controller configured to control the first electrode to have a first potential that is lower than a second potential of the cover.   
     
     
         2 . The target supply device according to  claim 1 , further comprising a second electrode facing the nozzle portion, wherein the potential controller is configured to:
 control the target material to have a third potential that is higher than the first potential, and   vary in pulses a potential of the second electrode between a fourth potential that is higher than the second potential and equal to or lower than the third potential, and a fifth potential that is equal to or higher than the second potential and lower than the fourth potential.   
     
     
         3 . The target supply device according to  claim 2 , wherein the potential controller is configured to control the first electrode to have a sixth potential that is higher than the first potential for a predetermined time after the target material is outputted from the nozzle portion and thereafter control the first electrode to have the first potential. 
     
     
         4 . The target supply device according to  claim 3 , wherein a difference between the sixth potential and the second potential is smaller than a difference between the sixth potential and the first potential. 
     
     
         5 . The target supply device according to  claim 1 , wherein the first electrode is disposed on an inner wall of the cover. 
     
     
         6 . The target supply device according to  claim 1 , wherein the first electrode is disposed on an outer wall of the cover.