Processing apparatus

Abstract

A processing apparatus including a holding unit having a holding surface for holding a platelike workpiece and a processing unit for processing the workpiece held by the holding unit. The processing unit includes a processing wheel opposed to the holding surface of the holding unit, a wheel mount having a supporting surface for detachably supporting the processing wheel, a rotating shaft connected to another surface of the wheel mount opposite to the supporting surface, a housing for rotatably supporting the rotating shaft, a mount cover provided on the housing so as to cover the wheel mount with a predetermined gap defined between the mount cover and the wheel mount, the mount cover having a cleaning water inlet communicating with the predetermined gap, and a cleaning water source connected to the cleaning water inlet.

What is claimed is: 
     
         1 . A processing apparatus comprising:
 holding means having a holding surface for holding a platelike workpiece; and   processing means for processing said workpiece held by said holding means;   said processing means including:   a processing wheel opposed to said holding surface of said holding means;   a wheel mount having a supporting surface for detachably supporting said processing wheel;   a rotating shaft connected to another surface of said wheel mount opposite to said supporting surface;   a housing for rotatably supporting said rotating shaft;   a mount cover provided on said housing so as to cover said wheel mount with a predetermined gap defined between said mount cover and said wheel mount, said mount cover having a cleaning water inlet communicating with said predetermined gap; and   a cleaning water source connected to said cleaning water inlet.