Combinatorial High Power Coaxial Switching Matrix

Abstract

A system and method for combinatorial processing of substrates in a processing chamber. The system includes a plurality of generators for supplying power into the processing chamber. A plurality of sputter guns provides power to different regions of a substrate. A switchbox switches power from a generator to a sputter gun via a plurality of coaxial switches. A controller positioned within the switchbox automatically distributes power from a specific generator to a specific sputter gun under programmable logic control.

What is claimed: 
     
         1 . A switchbox for combinatorial processing of substrates in a processing chamber, comprising:
 a plurality of coaxial switches positioned within the switchbox, wherein the plurality of coaxial switches forms a switching matrix for switching power from each of a plurality of power supplies to each of a plurality of sputter guns within the processing chamber; and   a controller positioned within the switchbox for distributing power from one of the plurality of power supplies to one of the plurality of sputter guns under programmable logic control.   
     
     
         2 . The switchbox for combinatorial processing of  claim 1  wherein the programmable logic control comprises a power supply exclusion logic to control the distribution of power from the plurality of power supplies to the plurality of sputter guns. 
     
     
         3 . The switchbox for combinatorial processing of  claim 2  wherein the power supply exclusion logic determines each combination of a power supply and a sputter guns used in the combinatorial processing of a substrate. 
     
     
         4 . The switchbox for combinatorial processing of  claim 1  wherein the plurality of coaxial switches in the switchbox enables the selection of a power supply to use with the one of the plurality of processing devices. 
     
     
         5 . The switchbox for combinatorial processing of  claim 1  wherein the switchbox distributes power to a sputter guns from at least one pulse direct current (PDC) generator or at least one radio frequency (RF) generator. 
     
     
         6 . The switchbox for combinatorial processing of  claim 1  wherein each coaxial switch is configured to route power to a plurality of sputter guns via a plurality of output paths from the coaxial switch.